Nanoscopic replication mechanism of surface microgeometry in technology of plasticity.

21世纪人类生活的各个方面都需要微细零件，金属成形技术应能响应这些要求。作为金属成形中锻压工艺的一个分支，在压铸工艺的基础上，尝试实现冲压件表面微观几何形状的纳米级复制，提出了一种基于原子力显微镜的几何形状采集方法和一种新的计算机软件，作为评估表面微观几何形状复制三维精度的通用工具。在该软件中，将刀具表面和工件表面的三维几何数据进行叠加，并通过最小化特定区域的平均间距来搜索最优构型。研制了一种新型的金属成形纳米级复制装置——“渐进式纳米级金属成形机”。它可以实现两步或多步成形的液压机上的准确和快速的改变冲模冲头。交叉的凹槽和凹痕是通过金刚石压头的刮擦和压痕形成的。两步压模工艺，其中整体形状形成和表面微观几何的纳米级复制被分离到每一步，给出了相当好的复制。50um x 50um目标区域的平均间距通过上述方法评估小于40nm。

In the 21st century various aspects of human life need microscopic parts and metal forming technology should have respond these requirements. An extension of coining process, one of the branch of forging process in metal forming was tried to enable nanoscopic replication of surface microgeometry of punch surfaces,As a general tool for evaluating 3-D precision of replication of surface microgeometry, a new method is developed based on geometry acquisition by AFM and a new computer software. In the software 3-D geometrical data of tool surface and workpiece surface were superimposed and optimum configuration was searchecd by minimizing the average spacing of a particular area.A new device for nanoscopic replication in metalforming named "Progressive Nanometer-Scale Metal Forming Machine" wvas developed. It enables two-step or multi-step forming on a hydraulic press by accurate and quick change of coining punch. Crossed grooves and indents were made by scratching and indentation of diamond indenters. The two-step coining process, where global shape forming and nanoscopic repiication of surface microgeometry are separated to each step, gave fairly good replication. The average spacing of a target area of 50um x 50um was evaluated less than 40nm by the above method.