Distributed Micro-Nanomachines which move with nanometer precision

纳米结构被用来开发分布式微纳米机械，它是传感器和执行器的集成系统。基于半导体技术的微机械加工已被应用于制造。高密度多探头数据存储系统，其中可以利用阵列探头并行执行记录和读取。新的记录原理已经开发出来了。它们是使用金刚石探针在聚合物薄膜上进行热机械记录，使用钻石探针在铁电薄膜上进行电记录，以及在导电聚合物薄膜上进行电记录。在导电聚合物膜上的后一种记录中，通过膜的相变增加了大约30倍的电阻用于读取。研究了用于非接触式多探针数据存储系统和用于高通量图形制作的多柱电子束光刻系统的静电透镜阵列式电子场发射器。用碳纳米管和金刚石作为发射体，证明了氢在碳纳米管表面的覆盖增强了电子发射，降低了发射电流的噪声。研制了具有6个运动自由度的整体式压电工作台。这不仅是多探头数据存储系统和多列电子束光刻系统的需要，也是扫描探头显微镜等的需要。分布式静电执行器具有亚微米级间隙面对面平行电极，多探头系统可以与静电微执行器一起移动，近场光学验证具有蝴蝶结天线和由纳米级薄悬臂梁制成的高灵敏度谐振传感器。

Nanostructures have been studied to develop distributed micro-nanomachines which are integrated systems of sensors and actuators. Micromachining based on semiconductor technology has been applied for the fabrication. High density multi probe data storage systems in which recording and reading can be carried out in parallel utilizing arrayed probes. New recording principles have been developed. These are thermomechanical recording on a thin polymer film using diamond probes, electrical recording on a thin ferroelectric film using diamond probes and electrical recording on a thin conductive polymer film. In the latter recording on a conductive polymer film, increased resistance about 30 times by the phase change of the film was used for the reading. Arrayed electron field emitters with electrostatic lens was studied for the purpose of non-contact multi probe data storage systems and multi-column electron beam lithography systems for the purpose of high throughput patterning. Carbon nano tube and diamond are used as the emitter and it was proved that surface coverage of the carbon nano tube with hydrogen enhances the electron emission and reduces the noise of the emission current. Monolithic piezoelectric stage which has 6 degrees of freedom of motion was developed. This is needed not only for the multi probe data storage systems and the multi-column electron beam lithography systems but also scanning probe microscopes and so on.Distributed electrostatic actuators which have sub-micro gap face to face parallel electrodes, multi probe system of which probes can move with electrostatic micro actuator, near-field optical prove which has bow tie antenna and highly sensitive resonant sensor which is made of nanometer level thin cantilever.