Multi-function-integrated Micro Systems Using Polymer Materials

在这项研究中，我们致力于将聚合物、有机半导体和蛋白质集成到微机电系统中的技术。我们介绍了一种有机led的图像化方法。我们通过在硅片上制造微边缘来压制OLED层。这使我们能够制造30微米宽的LED条纹阵列。我们还在释放的硅微结构上制造了OLED。我们制造了一个垂直有机晶体管。它被设计为oled的电流驱动器。由于它具有垂直结构，因此适合放置在OLED上/下。我们报道了一种使用视网膜膜蛋白的生物分子图像传感器。为了制备光感受器阵列，提出了一种电沉积和表面修饰的br图案化方法。制作了一个图像传感器，它由一个8x8的1毫米方形bR光感受器阵列组成。实验证明，该图像传感器可以检测到渐变图像和黑白图像。我们提出了一种触觉传感器，由嵌入PDMS的300纳米厚的压阻悬臂组成。传感器检测施加在其表面上的剪切应力。我们在X，Y和Z方向上对传感器施加0 [N]到20 [N]的力。该传感器在x轴上线性度好，灵敏度高。

In this research, we worked on techniques to integrate polymers, organic semiconductors and proteins into micro electro mechanical systems.We introduced a patterning method for organic LEDs. We patterned the OLED layers by pressing the layer with a micro edges fabricated on a silicon wafer. This enabled us to fabricate 30-micro-meter-wide LED stripe arrays. We also fabricate an OLED on a released silicon microstructure.We fabricated a vertical organic transistor. It was designed as a current driver for OLEDs. Since it has a vertical structure, it is suitable to be arranged on/under an OLED. We report a biomolecular image sensor using a retinal membrane protein. To fabricate the photoreceptor array, a bR-patterning method with electro-deposition and surface modification was developed. An image sensor, which consists of an 8x8 array of 1-millimeter square bR photoreceptors, was fabricated. It was demonstrated that the image sensor detected a gradual image and black and white images.We propose a tactile sensor consisting of standing 300 nm-thick piezoresistive cantilevers embedded in PDMS. The sensor detects the shear stress applied on its surface. We applied the force of 0 [N] to 20 [N] in the X,Y,and Z directions to the sensor. The sensor showed a good linearity and high sensitivity in X-axis.