Multi-Scale Measurement and Evaluation for Sub-Nanometer Size of Surface Profile

本研究旨在以亚纳米量级的前沿制造工艺生产的超精加工表面的多尺度性能的测量和评价。目的是通过实验确定从1/f到白色的表面频率-幅度关系随HD基板和磁头的表面光洁度等级的变化，并为上述精加工表面结构的表面分析和功能建模领域做出贡献。本研究通过对垂直扫描白光干涉显微镜测量的真实表面数据进行分形分析，明确了表面结构的变化。从具有亚纳米Ra值的被测表面的功率谱密度分析了超文件加工表面结构。实验结果表明，在具有亚纳米Ra的表面上，表面轮廓功率谱密度的斜率随Ra值的减小而减小。随着Ra值的减小，分维增大。在最精细的表面，尺寸达到2，这是一个不可能的值。这意味着这些曲面将其属性从分形区更改为近白色区域。

This research aims at the measurement and evaluation of multi-scale properties of extremely finished surface which is produced by leading-edge manufacturing process in order of sub-nanometer.The purpose is to dear experimentally the property change of surface frequency-amplitude relation from 1/f to white in accordance with the grade of surface finish of HD substrate and head of magnetic media, and to contribute the fields of surface analysis and functional modeling of surface structure of above mentioned fine finished parts.This research made clear the change of surface structure by Fractal analysis from real surface data which was measured by vertical scanning white light interferometric microscope.Super file finished surface structure was analyzed from power spectrum density of measured surface which has sub-nanometer Ra value. The measurement has done selecting the field of view of microscope so that wide spectrum density was acquired.As the results, in the surface that has sub-nanometer Ra the slope of power spectral density of surface profile decreases with decrease its Ra value. Then the Fractal dimension increases with decrease Ra value. At the finest surface the dimension reached 2 which is a impossible value. This means these surfaces change its property from Fractal region to near white region.