Research on the Nanolaboratory for the consruction of new nanodeviees

1.我们开发了透射电子显微镜（TEM ; Hitachi，H-800）内的超小型纳米机器人操纵器，并提出了扫描电子显微镜（SEM ; JEOL，JSM 6500 F）内的TEM样品制备方法。我们还在TEM（JEOL，JEM-2100）中实验构建了一个超小型纳米机器人，通过PC控制整个系统，通过CCD相机观察，并通过能量色散X射线光谱（EDS）分析元素性质.基于纳米实验室的制备/薄膜沉积我们对单根碳纳米管（CNT）的电子束诱导沉积（EBID）沉积薄膜进行了EDS元素分析。以W（CO）_6为前驱体制备的导电沉积层中钨的质量分数高达98%。研究还表明，用二氧化钌（RuO_2）修饰的碳纳米管发射体的场发射电压降低了约20%.基于纳米实验室的操纵/组装用部分剥离外层的伸缩式多壁CNT原位制备纳米轴承单元。原位实验揭示了一个详细的过程与高分辨率和透射电镜图像。4测量/评价基于NanolaboratoryWe揭示了伸缩纳米管的滑动运动依赖于所施加的外电场。提出了一种新型的纳米距离传感器，通过检测单根碳纳米管的发射电流、伸缩式碳纳米管内外层间的电阻变化以及单根碳纳米管与基底间的滑动电阻变化，对该传感器进行了评价。

1. Development of ultra-small nanorobotic manipulatorWe developed an ultra-small nanorobotic manipulator inside a transmission electron microscope (TEM ; Hitachi, H-800) and proposed a TEM sample preparation method inside a scanning electron microscope (SEM ; JEOL, JSM6500F). We also experimentally constructed an ultra-small nanorobotic inside a TEM (JEOL, JEM-2100) to control of the whole system by PC, observe by CCD camera, and analyze the elemental property by energy-dispersive X-ray spectroscopy (EDS).2. Fabrication/ Film deposition based on NanolaboratoryWe have done the EDS elemental analysis of the deposited thin film by electron-beam-induced deposition (EBID) of single carbon nanotube (CNT). Using W(CO)_6 as precursor, the conductive deposition had high purity of tungsten as 98% by mass. It was also revealed that the field emission voltage was reduced approximately 20% by the CNT emitter modified with ruthenium dioxide (RuO_2).3. Manipulation/Assembly based on NanolaboratoryIn situ fabrication of nanobearing unit with a telescoping multi-walled CNT, which is partially peeled off outer layers, has been done. In situ experiments revealed a detail process with high-resolution and transmission image of TEM.4 Measurement/Evaluation based on NanolaboratoryWe revealed the sliding motions of the telescoping nanotube depended on the applied external electric field. A new type distance nano-sensor was also proposed and evaluated by detecting the emission current of single CNT, the resistance change between outer and inner layers of telescoping nanotube, and the sliding resistance change between single CNT and substrate.