Three-Dimensional Manipulation of Nano Materials by Multiple Multi-degree-of-freedom Nanoprobes

研究了利用多个多自由度纳米探针在三维空间操纵纳米材料的基本技术。本文的主要工作成果如下：1.系统技术对纳米材料进行三维观察和操纵，我们研制了一种多自由度纳米探针系统，该系统可以安装在场发射型扫描电子显微镜（FE-SEM）内部。我们采用AFM悬臂梁在机械手的尖端。系统的总自由度为16。在FE-SEM中，可以精确地控制探针的尖端位置，实现探针的三维立体化。碳纳米管的定向技术碳纳米管是通过静电力定向的，因此它们可以很容易地被操纵。通过实验对几种条件进行了测试和评价.纳米材料三维操控的测控技术利用介电泳力将纳米材料吸附在探针的尖端，并通过对探针的三维操控将其定位在任意位置.纳米材料的固定与力的测量研究了电子束诱导沉积法（EBID）对碳纳米管的固定。我们在FE-SEM的腔室中通入气体并沉积导电薄膜。我们研究了EBID的几种条件，并评价了沉积材料的性能。使用EBID，我们将碳纳米管固定在AFM探针的尖端。在纳米管探针的尖端施加力，并通过FE-SEM图像测量其变形。在对纳米探针进行标定的基础上，研制了皮牛顿力测量系统.碳纳米管的力学性能评价利用该系统对几种碳纳米管样品进行了形变，并对样品的力学性能进行了测试和评价。

We studied on the basic technologies to manipulate nanomaterials in three-dimensional space using multiple nanoprobes each of which has multi-degree-of-freedom. Achievements of this work are summarized as follows.1. System technology to observe and manipulate nanomaterials three dimensionally.We developed a multiple degree-of-freedom nanoprobe system which can be set inside the field emission type scanning electron microscope (FE-SEM). We employed AFM cantilever at the tip of the manomanipulator. Total degree-of-freedom of the system is sixteen. We can control the tip of the probes precisely and three dimensionally in the FE-SEM.2. Orientation technology of carbon nanotubesCarbon nanotubes are oriented by the electrostatic force so that they can be manipulated easily. Several conditions are tested and evaluated by the experiments.3. Measurement and control technology to manipulate nanomaterilas three dimensionallyWe succeeded in picking up the nanomaterial by adhering it at the tip of the probe by the dielectrophoretic force and positioned it at arbitrary location based on the three-dimensional manipulation of the probe.4. Fixation and force measurement of nanomaterialsWe studied on the electron beam induced deposition (EBID) to fix the carbon nanotube. We introduced gas in the chamber of FE-SEM and deposited the conductive thin film. We investigated several conditions of EBID and evaluated the property of deposited materials. Using EBID, we fixed the carbon nanotube at the tip of the AFM probe. The force is applied at the tip of the nanotube probe and its deformation was measured by the FE-SEM image. Base on the calibration of the nanobue probe, we developed a pico-Newton force measurement system.5. Evaluation of mechanical property of carbon nanotubesSeveral samples of carbon nanotube are deformed by the system and mechanical property of the samples are measured and evaluated.