Three-Dimensional Manipulation of Nano Materials by Multiple Multi-degree-of-freedom Nanoprobes

我们研究了利用多个纳米探头在三维空间操纵纳米材料的基本技术，每个探头具有多个自由度。本工作取得的成果概括如下：1.为了对纳米材料进行三维观察和操纵，我们开发了一种可安装在场发射型扫描电子显微镜(FE-SEM)内的多自由度纳米探针系统。我们在操纵器的顶端安装了AFM悬臂。该系统的总自由度为16。在FE-SEM中，我们可以精确地、三维地控制探头的尖端。碳纳米管的定向技术碳纳米管利用静电力进行定向，便于操作。通过实验对几种条件进行了测试和评价。纳米材料三维操纵的测控技术基于对探针的三维操纵，利用介电泳力将纳米材料粘在探头顶端，实现了纳米材料的拾取并放置在任意位置。纳米材料的固定和测力研究了电子束诱导沉积(EBid)固定碳纳米管的方法。我们在FE-SEM的腔体中引入气体并沉积了导电薄膜。我们考察了eBid的几种条件，并对沉积材料的性能进行了评价。使用eBid，我们将碳纳米管固定在AFM探针的尖端。将力施加在纳米管探头的尖端，并通过FE-SEM图像测量其变形。在对纳米管探头进行标定的基础上，研制了皮牛顿力测量系统。碳纳米管的力学性能评价利用该系统对几个碳纳米管样品进行了变形，并对样品的力学性能进行了测试和评价。

We studied on the basic technologies to manipulate nanomaterials in three-dimensional space using multiple nanoprobes each of which has multi-degree-of-freedom. Achievements of this work are summarized as follows.1. System technology to observe and manipulate nanomaterials three dimensionally.We developed a multiple degree-of-freedom nanoprobe system which can be set inside the field emission type scanning electron microscope (FE-SEM). We employed AFM cantilever at the tip of the manomanipulator. Total degree-of-freedom of the system is sixteen. We can control the tip of the probes precisely and three dimensionally in the FE-SEM.2. Orientation technology of carbon nanotubesCarbon nanotubes are oriented by the electrostatic force so that they can be manipulated easily. Several conditions are tested and evaluated by the experiments.3. Measurement and control technology to manipulate nanomaterilas three dimensionallyWe succeeded in picking up the nanomaterial by adhering it at the tip of the probe by the dielectrophoretic force and positioned it at arbitrary location based on the three-dimensional manipulation of the probe.4. Fixation and force measurement of nanomaterialsWe studied on the electron beam induced deposition (EBID) to fix the carbon nanotube. We introduced gas in the chamber of FE-SEM and deposited the conductive thin film. We investigated several conditions of EBID and evaluated the property of deposited materials. Using EBID, we fixed the carbon nanotube at the tip of the AFM probe. The force is applied at the tip of the nanotube probe and its deformation was measured by the FE-SEM image. Base on the calibration of the nanobue probe, we developed a pico-Newton force measurement system.5. Evaluation of mechanical property of carbon nanotubesSeveral samples of carbon nanotube are deformed by the system and mechanical property of the samples are measured and evaluated.