Development and application in the new method of the surface coating of microparticles, the barrel-sputtering system

粉状材料可用于许多工业材料和产品。为了开发更具吸引力的粉状材料，对粉状材料进行表面改性是有效的方法之一。然而，传统的方法只是湿法，存在废液处理、改性材料的限制等问题。为此，研制了一种新型的六角形桶形射频溅射系统，用于干燥过程中粉状材料表面的修饰，称为桶形溅射系统。对不同晶粒形状和尺寸的金属、陶瓷、聚合物和离子晶体粉末的表面涂层进行了验证。结果表明，粉末颗粒表面可以均匀地覆盖金属、合金和氧化物层，而不受其形状的影响。此外，粉末颗粒的大小适用于从几厘米到几百纳米。此外，涂层材料的形式被控制在薄层和纳米颗粒之间。以开发功能性粉末状材料为例，利用该系统制备了用于聚合物电解质燃料电池的电化学催化剂。与传统湿法制备的催化剂相比，纳米Pt-Ru修饰的炭黑粉末表现出优异的性能。

Powdery materials are available in many industrial materials and products. In order to develop the more attractive powdery materials, surface modification of powdery materials is one of the useful method. However, the conventional method was only the wet process which has some problem such as disposal of waste solution, and limiting of the modified materials. Therefore, a new RF sputtering system installed with a hexagonal-barrel was developed for modifying the surfaces of powdery materials in dry process, named as barrel-sputtering system.The validity of this system was examined for surface coating of metal, ceramics, polymer and ionic crystal powders with different grain shapes and sizes. It was found that the surfaces of powder grains could be uniformly coated with metal, alloys and oxides layers, regardless of their shapes. In addition, the size of powder grains was applicable from several centimeters to several hundred nanometers. Moreover, the form of coating materials was controlled between a thin layer and the nanoparticles.For example to develop the functional powdery materials, the electrochemical catalyst as the usage in the polymer electrolyte fuel cell was prepared by using the system. The carbon black powder modified with Pt-Ru nanoparticles showed the excellent performance in comparison with the catalysts prepared by the conventional wet process.