Development of functional surface by nano plastic forming

本研究开发了一种新的纳米/微米加工技术--纳米塑性成形技术，并研究了一种新的表面技术--利用纳米塑性成形技术开发功能表面。(1)A研制了一种新型的纳米成形装置，用于纳米成形试验。该设备由超精密工作台、称重传感器和超精细压印工具（模具）组成。工作台的运动由计算机控制，成形力和压印位置可在计算机上编程。该工具由单晶金刚石制成，并通过抛光和FIB加工制造。几种压印工具，即刀刃工具、平面工具、微结构工具、纳米结构工具、点工具等，工具被印在工作材料上，它的结构被复制在材料上。（2）利用纳米成形装置，采用刀口工具，对硬脆材料的临界成形深度进行了分析。韧性/脆性转变是 ...更多信息 基于塑性理论和断裂力学理论，对临界深度的影响因素进行了研究。结果表明，临界深度取决于工作材料的断裂韧性和屈服应力。（3）研究了单晶铜的微塑性变形性能。采用刀口工具压痕法对三种不同晶向的试样进行了测试。用EBSD分析了螺旋槽的截面，计算了螺旋槽周围自旋矢量的分布。采用细观塑性有限元法对单晶铜纳米成形过程进行了数值模拟。(4)A提出了一种基于纳米成形和平板涂覆抛光的纳米加工新工艺。该技术可有效地制造小型机械零件、微复合结构表面和微结构箔。（5）利用纳米成形技术制备功能表面。在玻璃片上制备了纳米结构，并对其光学性能和摩擦性能进行了分析。结果表明，表面性能可以通过控制纳米成形条件来控制。纳米成形技术是开发功能表面的有效手段。少

In this research, a new nano/micro fabrication technology by nano plastic forming method was developed, and a new surface technology that develops functional surface by using the nano plastic forming was studied.(1)A new nano forming device was developed to conduct nano forming test. The device consists of ultra precision stages, a load cell, and a ultra fine imprinting tool (mold). The motion of stages is controlled by a computer, and forming load and position of imprinting can be programmed on the computer. The tool is made of a single crystal diamond, and manufactured by polishing and FIB machining. Several kinds of imprinting tools, i.e. a knife edge tool, a flat tool, a micro structured tool, a nano structured tool, a point tool etc., were developed A tool is imprinted on the work material, and its structure is copied on the material..(2)The critical depth of hard brittle materials was analyzed with the nano forming device by using a knife edge tool. Ductile/brittle transition was … More studied theoretically based on plasticity theory and fracture mechanics, and effective factors on the critical depth was investigated. Results explained that the critical depth depends on the fracture toughness and yield stress of the work material.(3)Micro plastic deformation property of single crystal copper was studied. Three kinds of specimen of various crystal orientation was tested by knife edge tool indentation. Cross section of indent grooves were analyzed by EBSD, and distribution of spin vectors around the grooves were calculated. Meso plasticity FEM was developed to simulate nano forming process of single crystal copper.(4)A new nano fabrication process based on nano forming and plate coating and polishing was developed. It is efficient to manufacture small mechanical parts, micro composite structured surface, and micro structured foil.(5)Functional surfaces were developed by nano forming technique. Nano structures were fabricated on glass plates, and their optical property and friction property were analyzed. Results indicates surface properties can be controlled by controlling nano forming conditions. Nano forming technique is efficient to develop functional surfaces. Less