Micro Machining of Glass with Ball End Mill

微塔斯等芯片上的实验室是用于少量样品的检测板，在生物或化学工业中已变得流行。尽管迄今为止，使用氢氟酸的化学蚀刻主要应用于芯片的制造，但是该工艺需要长时间来完成具有危险操作的制造。本研究提出以玻璃研磨取代蚀刻来加工平板上的微通道。（1）研制了一台由刀具倾角控制单元和工作台驱动单元组成的七轴联动机床，实现了在保持刀具倾角的情况下加工玻璃板上的微槽。加工过程的控制有两种方式：位图控制和程序控制。由于大多数切割操作都是为了加工二维图案，因此位图控制可以实际应用。（2）将铣削工艺应用于机械加工中， ...更多信息 在切割机的进给中在玻璃上加工出深15-20μm、宽150-175μm的微槽。硬质合金球头立铣刀用于降低加工成本和抑制裂纹扩展，刃口圆度大。以20000 rpm的转速和0.48mm/min的进给速度，球头立铣刀倾斜45 °作为一组适用的切削条件，可以在水中精加工裂纹表面。提出了几种模型，讨论了刀具轴线倾斜对脆性断裂、表面光洁度、切削温度和刀具磨损的影响。最后，一个DNA微阵列的制造，以提高识别的DNA序列作为一个实际应用所提出的加工。采用球头米尔斯铣刀，在合适的切削条件下，可以在玻璃表面加工出15μm和20μm深的微沟槽。(3)A开发了一种铣削刀具，通过改变刃口数目和刃口形状来提高生产率。所开发的工具使我们能够以比传统工具高10倍的进给速度去除玻璃而不发生脆性断裂。少

The Lab on a chip such as micro TASs, which is the inspection plates for a small amount of samples, has become popular in the bio or chemical industries. Although chemical etching with hydrofluoric acid has been mainly applied to manufacturing of the chips so far, the processes requires the long time to complete manufacturing with hazardous operations. This study presents glass milling to machine the micro channels on the plates instead of etching. The results may be summarized as follows :(1)A 7-axis machine tool, which consists of the control unit of the tool inclination and the driving unit of the machine table, is developed to machine the micro grooves on the glass plates with keeping the tool inclination. The machining process can be controlled in two manners : the bitmap control and the programmed control. Because most of the cutting operations are performed to machine two-dimensional pattern, the bitmap control can be applied practically.(2)The milling process is applied to mach … More ining of the micro grooves 15-20μm deep and 150-175μm wide on the glass in a feed of the cutter. The ball end mill made of tungsten carbide is used to reduce the machining cost and suppress crack propagation with large edge roundness. A crack-fee surface can be finished in water at a rotational speed of 20000rpm and at a feed rate of 0.48mm/min with the ball end mill inclined at an angle of 45 deg as a set of the applicable cutting conditions. Some models are presented to discuss the effect of the cutter axis inclination on brittle fracture, the surface finish, the cutting temperature during cutting, and the tool wear. Finally a DNA micro array is manufactured to improve the identification of the DNA sequence as a practical application of the presented machining. The micro drains 15μm and 20μm deep with the micro asperities can be fabricated on the glass in milling with the ball end mills in the applicable cutting conditions.(3)A milling tool is developed to improve the production rate by the change of the number of the edges and the edge shape. The developed tool enables us to remove the glass without brittle fracture at 10 times higher feed rate than that of the conventional tool. Less