High-resolution X-Ray diffractometer

慕尼黑工业大学（TUM） Walter Schottky研究所（WSI）的半导体技术主席负责研究新型中红外和太赫兹量子级联激光器，中红外表面发射激光器，基于半导体异质结构加工成亚波长光学纳米谐振器的非线性光学超表面，以及结合半导体激光源，探测器，以及在同一半导体平台上的无源和有源光子元件。为了生产所有这些研究课题的III/V半导体异质结构，主席使用了三个分子束外延（MBE）系统和一个金属有机气相外延（MOVPE）系统。x射线衍射（XRD）系统对MBE和MOVPE生长的结构的化合物半导体层组成和厚度的校准至关重要。因此，这是我们每个研究项目可行性的基本要求之一。此外，该系统应该能够在至少4 × 4英寸的面积上进行均匀性测量，以及使用互反空间图进行晶体质量研究。后者特别有趣，因为大多数使用的器件结构都是高度应变的层封装。Walter Schottky研究所唯一合适的XRD系统已经使用了30多年，并且已经到了使用寿命的尽头。具体来说，它的硬件和计算机软件不再由制造商支持。在过去的几年里，由于制造商不再支持该系统，该系统经历了几次故障，由当地一家电子商店修复。该提案要求联邦政府支持购买新的XRD系统以取代旧系统，并使主席研究得以继续。

The Chair for Semiconductor Technology in the Walter Schottky Institute (WSI) of the Technical University of Munich (TUM) performs research on novel mid-infrared and terahertz quantum cascade lasers, mid-infrared surface-emitting lasers, nonlinear optical metasurfaces based on semiconductor heterostructures processed into sub-wavelength optical nanoresonators, and photonic integrated circuits that combine semiconductor laser sources, detectors, as well as passive and active photonic elements on the same semiconductor platform. To produce the III/V semiconductor heterostructures for all of these research topics, the Chair uses three Molecular Beam Epitaxy (MBE) systems and one Metal-Organic Vapor Phase Epitaxy (MOVPE) system. An X-Ray diffractometer (XRD) system is critical to provide calibration of the compound semiconductor layer composition and thicknesses for the structures grown by MBE and MOVPE. It is thus one of the basic requirements for the feasibility of each of our research projects. In addition, the system should be able to perform homogeneity measurements over an area of at least 4 × 4 inches, as well as crystal quality studies using Reciprocal Space Maps. The latter is particularly interesting since most of the device structures used are highly strained layer packages. The only suitable XRD system in the Walter Schottky Institute is more than 30 years old and is at the end of its lifetime. Specifically, its hardware and computer software are no longer supported by the manufacturer. In the past several years, the system experienced several breakdowns that were fixed by a local electronic shop as the manufacturer does not support the system any longer. This proposal requests support from the Federal Government in acquiring a new XRD system to replace the old system and enable the continuation of the chair research.