Practical use of transmission type semiconductor spatial light modulator panel

光计算系统的建立是光电子学进一步发展的要求。空间光调制面板将是这些系统中的关键设备。提出了一种基于半导体的光传输型空间光调制面板，具有高速运行、高消光比和大规模集成等特点。在2006年至2007年的研究中，研究了1)调制像素的加速，2)功耗的降低，3)插入损耗的降低，4)实现光输入信号的光学操作，5)实现光调制器面板和像素（1000 × 1000）的大规模集成，并取得了以下成果：加速：通过将像素尺寸缩小到60 μ m^2的角级，降低了像素的容量，运行速度可以加快到120MHz.2。节约电力：优化了半导体像素结构中杂质的密度。因此，像素的功耗降低到1/10以上，达到0.1 mw。插入损耗的降低：通过降低AlGaAs材料在该器件中的吸收损耗，插入损耗的值能够降低到4dB。（过去元件插入损耗10dB）利用光信号实现光运算：将异质双极光电晶体管与上述调制像元集成，实现了利用光输入信号控制光输出强度的光反转运算。光调制器面板的实现：制作了6×7光调制器面板，并确定了字符图像的光输出功率。虽然不能实现1000 X 1000的集成。

Establishment of optical computing systems is expected for further development of optoelectronics. Spatial light modulation panels are going to be key devices in these systems. We have proposed the semiconductor-based spatial light modulation-panel of the optical transmission type with the feature such as the high-speed operation, the high extinction ratio and the large-scale integration. In this research between 2006 and 2007 years, the targets such as 1) the speed-up of the modulation pixel, 2) the decrease of power consumption, 3) the decrease of the insertion loss, 4) achievement of optical operation with light input signal and 5) Achievement of light modulator panel and making to the large-scale integration of pixels (1000 x 1000) were researched and the following results were achieved.1. Speed-up: The capacity of the pixel was decreased by miniaturizing the size of the pixel to 60 u m^2 corner level, and operation speed was able to be speed up to 120MHz.2. Economizing electric power: The densities of impurities in semiconductor pixel structure were optimized. As a result, the power consumption of the pixel has decreased to past 1/10 and become 0.1mW.3. the decrease of the insertion loss: The value of the insertion loss was able to be reduced up to 4dB by decreasing the absorption loss in this device with the AlGaAs material. (Insertion loss 10dB of element in the past)4. Achievement of optical operation with light signal: The hetero bipolar phototransistor and the above-mentioned modulation pixel were integrated, and an optical reversing operation to control optical output intensity by the optical input signal achieved.5. Achievement of light modulator panel: 6×7 light modulator panel was made, and the optical output-power of the character image was confirmed. Though the integration of 1000 X 1000 was not able to be achieved.