X-Ray Photon Correlation Spectroscopy Study of Crystal Growth Dynamics

用x射线光子相关光谱研究了分子束外延的动力学。实验在SPring-8的BL11XU同步加速器束流线上进行，使用集成了分子束外延室的x射线衍射仪。在化合物半导体生长过程中，用电荷耦合器件照相机测量了反射的x射线。通过相干衍射特征散斑图的时间变化，成功地观察了晶体生长过程中表面结构的演变。

Dynamics of molecular beam epitaxy has been investigated by X-ray photon correlation spectroscopy. Experiments were performed at the BL11XU synchrotron beamline at SPring-8 using a X-ray diffractometer integrated with a molecular-beam epitaxy chamber. The reflected X-rays were measured with a charge-coupled device camera while compound semiconductors were being grown. Through the temporal changes of speckle patterns characteristic of coherent diffraction, evolution of the surface structures during crystal growth was successfully observed.