System for 3D femtosecond laser-based micromachining

复杂玻璃和玻璃陶瓷的精密3D微加工是微系统技术的国际重要研究领域，也是图林根州区域创新战略的重要研究领域。应用领域从微传感器和执行器、光学和精密计量到生命科学、能量收集和量子技术。可再现和精确的玻璃微加工仍然是一个主要挑战，并且使用例如基于氟等离子体的工艺来进行。然而，通过这些方法在玻璃中创建3D结构目前仅在非常有限的程度上是可能的，并且不成比例地复杂。因此，本申请旨在获得一种用于玻璃和玻璃陶瓷的资源节约、无氟气体和高效3D微加工的系统。使用聚焦的飞秒激光，可以在高度局部化的区域中对玻璃进行改性。3D加工通过在3D中引导激光焦点来执行，主要集中在所谓的“选择性激光（诱导）蚀刻”（SLE）和玻璃的密封焊接上。其次是局部折射率修改，选择性材料烧蚀（例如金属薄膜）和双光子聚合（2PP）。这允许创建复杂和新颖的3D功能结构，这些结构不能用TU Ilmenau目前可用的工艺生产，或者只能通过不成比例的高努力来生产。最后但并非最不重要的是，该设施因此也允许在跨学科的微系统，这是值得探索的设计和建设的新方法。这种基于激光的3D微加工与等离子体玻璃微结构、光结构玻璃和电子束玻璃纳米结构领域的现有研究工作相结合，允许创新的自由度，从而在TU Ilmenau和微系统技术集团实施新型的跨学科和合作研究项目。该设施将在微系统技术集团的洁净室实验室内运行，靠近微纳米技术中心（DFG核心设施），在受控的实验室环境中开展合作和跨学科研究工作，该实验室还提供所有外围技术。此外，保证了与正在进行的研究主题的无缝集成。当然，该设施将可用于内部和外部研究合作。

The precise 3D micromachining of complex glasses and glass ceramics represents an internationally important research area for microsystems technology, but also for the state of Thuringia in terms of its regional innovation strategy. The field of application ranges from microsensors and actuators, optics and precision metrology to lifesciences, energy harvesting and quantum technologies. Reproducible and precise glass micromachining is still a major challenge and is carried out using, for example, fluorine plasma-based processes. However, the creation of 3D structures in glass by these methods is currently only possible to a very limited extent and is disproportionately elaborate. The application therefore aims to acquire a system for resource-saving, fluorine-gas-free and efficient 3D micromachining of glasses and glass ceramics. Using a focused femtosecond laser, glasses can be modified in a highly localized area. 3D processing is performed by guiding the laser focus in 3D, primarily focusing on so-called "selective laser(-induced) etching" (SLE) and hermetic welding of glasses. Secondary are local refractive index modifications, selective material ablation (e.g. metal thin films) and two-photon polymerization (2PP). This allows complex and novel 3D functional structures to be created, which cannot be produced with the processes currently available at the TU Ilmenau, or only with disproportionately high effort. Last but not least, the facility thus also permits new approaches in the design and construction of interdisciplinary microsystems, which are worth exploring. The combination of this laser-based 3D micromachining with the existing research work in the field of plasma-based glass microstructuring, photostructurable glasses and an electron beam-based glass nanostructuring, for which a patent has recently been filed, allows innovative degrees of freedom and thus the implementation of new types of interdisciplinary and cooperative research projects at the TU Ilmenau and the Microsystems Technology Group. The facility will be operated in the clean room laboratory of the Microsystems Technology Group in close proximity to the Center for Micro- and Nanotechnologies (DFG Core Facility) to implement cooperative and interdisciplinary research work in a controlled laboratory environment, which also provides all peripheral technologies. Furthermore, a seamless integration into the ongoing research topics is guaranteed. Of course, the facility will be available for in-house and also external research collaborations.