Development and applications of a novel low-temperature plasma source under atmospheric pressure

研制了一种新型大气压等离子体源。该源在介质阻挡层表面具有许多具有浮动电势的铜点阵列。浮置电极，即铜点，与势垒放电相比，击穿电压降低了约20%。研究表明，放电发生在铜点的边缘，随着时间的推移，它会移动到与浮动电极分开的区域，并与浮动电极保持较短的距离。初步的表面处理实验表明，该等离子体源在低温等离子体领域具有良好的应用前景。

A novel atmospheric pressure plasma source has been developed. The source has an array of many copper dots with floating potential on the dielectric barrier surface. The floating electrodes, that is, the copper dots decreased the breakdown voltage by about 20% as compared with barrier discharge. It was clarified that a discharge occur around edges of copper dot and it move to a region separated from floating electrodes and at a short distance from them as time pass. It was found from a preliminary experiment of surface treatment that this plasma source is applicable to applications in the field of low-temperature plasma.