Fabrication Process Improvement of Multi-channel Optical MEMS Switch Using a Belt-shaped Thin Film Mirror

本文介绍了一种基于带状薄膜反射镜的多通道MEMS光开关的制作工艺改进。该开关结构简单，无磨损。然而，其合适的制造工艺尚未明确，原型开关是手工组装的。本文讨论了合适的制作工艺，并考察了制作工艺的改进对开关精度和驱动电压的影响。通过改进的制作工艺制作的光开关比以前的开关更精确地控制光斑位置。此外，开关的最小驱动电压降低。这些实验结果加快了利用带状薄膜反射镜实现多通道MEMS光开关的速度。

This paper describes fabrication process improvement of a multi-channel optical MEMS switch using a belt-shaped thin film mirror. This switch has advantages of simple structure and no wear. However its suitable fabrication process is not clarified yet and the prototype switches were manually assembled. In this paper, the suitable fabrication process was discussed and the effects of the fabrication process improvement on the switching accuracy and the driving voltage were examined. The optical switch made through the improved fabrication process controlled the spot position more accurately than the previous switches. In addition, the minimum driving voltage of the switch reduced. These experimental results quicken the realization of the multi-channel optical MEMS switch using a belt-shaped thin film mirror.