Constructing of film-deposition system equipped precursor recycling system

本研究的目的是开发一种新型的薄膜沉积系统，该系统完全基于超临界流体技术设计，配备了金属-有机前驱体的回收系统。通过(1)超临界CO_2萃取分离金属-有机化合物循环系统的试制，(2)膜沉积设备中准条件下金属-有机化合物回收的模拟实验，(3)超临界CO_2膜沉积过程中未反应前驱物和副产物的同时收集的结束性讨论。我们获得了一些有价值的数据和知识，用于研究二氧化钛(β)薄膜的典型前驱体--二酮酸钛在超临界CO_2条件下的溶解和分解行为。阐明了金属-有机前驱体向固体二氧化钛沉积的反应机理。

The purpose of this research is to develop novel thin-film deposition system equipped recycling system for metal-organic precursors, which is designed totally based on supercritical fluid technology. The present research project was accomplished through (i) the trial production of recycling system for metal-organic compounds by extraction and separation process using supercritical carbon dioxide (CO_2), (ii) simulated experiment for collecting metal-organic compounds under pseudo-condition in film-deposition equipment, and (iii) conclusive discussion for simultaneous collection of unreacted precursors and byproduct compounds during film-deposition process under supercritical CO_2. We obtained some valuable data and knowledge for dissolution and decomposition behavior of Ti β-diketonates, typical precursors for titanium dioxide (TiO_2) films, under supercritical CO_2 condition, and then clarified the reaction mechanism from metal-organic precursors to solid TiO_2 deposition.