3D Super-Resolution Imaging for High-Speed Defect Inspection by Using Active Spatial Control of Light

首先，我们提出了一种基于多束激光三维干涉的三维结构照明的产生和控制新技术。然后，我们进行了数值模拟优化的几个参数，如多个激光束的空间位置，入射角和光的偏振条件。实际上，已经发现可以通过多束激光的相移来产生和控制在各个方向上具有高空间频率的3D结构照明。在此基础上，研制了四光束干涉三维结构照明装置。通过一系列的实验，我们确定了三维结构照明的产生和精确控制。为了实现该方法的三维超分辨，需要根据获得的图像信息和给定的结构照明信息重建出样品的三维信息。通过一系列基于傅里叶光学的数值模拟，利用13幅三维图像和三维反卷积技术证实了三维超分辨率。

First, we proposed the novel technique for the generation and control of 3D structured illumination based on 3D interference of multiple laser beams. Then, we performed numerical simulations for optimizing several parameters such as spatial position of multiple laser beams, incident angles and conditions of polarization of light. Actually, it was found that the 3D structured illumination with high spatial frequencies in all directions could be generated and controlled by phase shift of multiple laser beams. Furthermore, we developed the apparatus for the 3D structured illumination using 4 laser beams interference. As a result of a series ofexperiments, we confirmed the generation and precise control of the 3D structured illumination. In order to realize the 3D super-resolution by the proposed method, it is needed that 3D information of the specimen is reconstructed from obtained image information and given information of the structured illumination. By the series of numerical simulations based on Fourier optics, the 3D super-resolution was confirmed by using 13 obtained 3D images and 3D deconvolution technique.