Development of Organic-Inorganic Hybrid Thin films of Extremely High Hardness and Chemical Durability

以过氢聚硅氮烷（PHPS）为原料，通过暴露于氨水蒸汽中制备二氧化硅薄膜。phps衍生的硅胶膜比烷氧基衍生的硅胶膜具有更高的硬度、化学耐久性和对塑料的附着力。在聚碳酸酯板上涂上聚甲基丙烯酸甲酯，然后涂上PHPS，然后暴露在氨水蒸汽中，成功地将铅笔硬度从低于10B提高到H - 2H。

Silica thin films were prepared from perhydropolysilazane (PHPS) via exposure to the vapor from aqueous ammonia. PHPS-derived silica films had higher hardness, chemical durability and adhesion to plastics than alkoxide-derived silica gel films. Polycarbonate plates were coated with polymethylmethacrylate, and then with PHPS, followed by the exposure to the vapor from aqueous ammonia, which successfully increased pencil hardness from under 10B to H - 2H.