Development of a novel space X-ray telescope based on micromachining technologies

高灵敏度的空间X射线观测需要大口径X射线望远镜。我们发明并一直在研制一种基于微加工技术的新型空间X射线望远镜。我们的方法是将薄片中的微孔侧壁用于X射线反射镜。典型的晶片厚度为数百微米，而微孔的宽度为数十微米。我们在世界上首次用这种方法验证了X射线反射和成像。在这项研究中，我们成功地利用单级样品光学系统提高了分辨率和反射率，并成功地制作了两级X射线望远镜。我们还验证了一种用重金属覆盖微孔的新工艺，并制作了12英寸的光学元件，据我们所知，这是有史以来制造的最大的微孔光学元件。此外，我们还研究并提出了一种用于未来空间任务的X射线成像光谱仪。

High sensitivity space X-ray observations need a large-aperture X-ray telescope. We invented and have been developing a novel space X-ray telescope based on micro machining technologies. Our method utilizes side walls of micropores made in a thin wafer for X-ray mirrors. A typical wafer thickness is hundreds micro meters, while the width of the micropore is tens micro meters. We verified X-ray reflection and imaging with this method for the first time in the world. In this research, we have succeeded to improve resolution and reflectivity with single-stage sample optics and to fabricate a 2-stage X-ray telescope. We also have verified a new process to coat the micropores with heavy metal and fabricated a 12-inch optic, which is to our knowledge the largest micropore optics ever fabricated. Furthermore, we have studied and proposed an X-ray imaging spectrometer using this telescope for future space missions.