Interaction dynamics of plasma fluctuations and nano interface properties

专注于将半导体结构的尺寸缩小到纳米级的研究已经产生了一类引人入胜的新型材料，它们表现出量子约束的特性。为了更快地发展纳米材料的制造方法，必须考虑等离子体波动对反应等离子体中纳米颗粒生长的影响，因为等离子体波动会影响尘埃等离子体中的纳米颗粒。因此，我研究了等离子体波动对纳米界面性能的影响。由于等离子体的波动，纳米颗粒的生长速度变慢，这导致纳米颗粒的密度增加，尺寸减小。通过开发的原位方法，我第一次能够在没有非原位测量的情况下确定反应等离子体中产生的纳米颗粒的尺寸分布。

Studies focused on reducing the dimensions of semiconductor structures1) to the nanometer regime have led to a fascinating class of novel materials that exhibit quantum confinement characteristics. For faster development of fabrication methods for nanomaterials, the effects of plasma fluctuations on the growth of nanoparticles in reactive plasmas must be taken into account because plasma fluctuations affect nanoparticles in dust plasmas. Therefore, I have investigated the effects of plasma fluctuation on the nano-interface properties. Nanoparticles grow more slowly for plasma fluctucations, which causes the density of nanoparticles to increase and their size to decrease. By the developed in-situ method, I have for the first time been able to determine the size distribution of nano-particles generated in a reactive plasma without ex-situ measurements.