High throughput multiprobe Rapid Probe Microscope system

Infinitesima开发了一种完全不同的原子力三维表面测量技术，即快速探针显微镜。它结合了革命性的热光学驱动和干涉测量系统，提供皮米级精度和比传统原子力显微镜系统快100倍的速度。该项目旨在通过在多个杠杆上复用干涉测量和驱动来进一步提高吞吐量，从而进一步提高10倍的速度。这对于解决影响目前正在开发和制造的更小和越来越多的3D特征的半导体制造过程的计量挑战将具有直接价值。

Infinitesima has developed a fundamentally different atomic force 3D surface measurement technique, the Rapid Probe Microscope. This combines revolutionary thermal-optical actuation with an interferometric measurement system delivering picometer precision and speeds \>100x faster than those achievable with conventional Atomic Force Microscope systems.This project aims to increase this throughput further by multiplexing the interferometry and actuation across many levers, bringing a further \>10x speed improvement. This will be of direct value to address the metrology challenges impacting the semiconductor fabrication processes of smaller and increasingly 3D features being developed and manufactured currently.