Free Access to Nanolithography & Supporting Processes, University of Bath

我们要求继续为以前成功的EPSRC资助的设备共享计划提供资金，为英国学术团体提供免费的使用点访问电子束纳米光刻在巴斯大学的大卫布利特纳米工厂。我们的计划将专注于为新的研究提供“泵启动”支持，通过访问我们的纳米制造工具，特别是在物理/工程生物学和物理/工程化学跨学科接口的工作。我们不仅将与用户分享我们广泛的设计和工艺专业知识，而且还将在一系列综合服务中提供培训和支持，包括纳米光刻、湿法和干法蚀刻、薄膜沉积和SEM/AFM成像。我们将积极寻求机会，尽可能提高早期职业用户（研究生和博士后研究人员）的多学科技能。我们还建议购买一种新的补充直写激光光刻工具，这将使我们能够为用户提供更快和更通用的服务，并具有先进原型设计的独特新功能（例如，在厚光致抗蚀剂中和/或在非平面衬底上的3D光刻）。

We request continued funding for a previous successful EPSRC-funded Equipment Sharing Initiative to provide UK academic groups with free point-of-use access to electron beam nanolithography in the David Bullett Nanofabrication Facility at the University of Bath. Our scheme will focus on providing 'pump-priming' support for new research that is enabled by access to our nanofabrication tools, particularly work at the Physics/Engineering-Biology and Physics/Engineering-Chemistry interdisciplinary interfaces. Not only will we share our extensive design and process expertise with users, but we shall also provide training and support within a comprehensive package of services including nanolithography, wet & dry etching, thin film deposition and SEM/AFM imaging. We will actively seek opportunities to enhance the multi-disciplinary skills of early career users (postgraduate and post-doctoral researchers) whenever possible. We also propose to purchase a new complementary direct-write laser lithography tool that will allow us to offer users a quicker and more versatile service with unique new features for advanced prototyping (e.g., 3D lithography in thick photoresist and/or on non-planar substrates).