Two-dimensional Photonics Fabrication Facility

在石墨烯、设计师超表面和集成量子或非线性光子器件之外的二维半导体方面的显着发现和进展正在推动光电和光子技术的革命。赫瑞瓦特大学的二维光子制造设施将通过英国独特的用户设施促进英国的这场革命。中心仪器，“无掩模”直写激光器，是一种光刻工具，可以快速制造大规模但定制的具有新功能的2D光子器件。无掩模激光写入器弥合了电子束光刻和常规光刻之间的横向分辨率和写入速度上的差距，以使得能够在大面积上快速制造纳米级光子器件。独特的光刻系统将通过电子束蒸发器进行增强，从而能够将高质量的金属和纳米精度的金属沉积到由直写激光器光刻定义的设备上。最后，对于最终的薄膜，表面和材料计量，光谱成像椭偏仪将被使用。这种独特的仪器是至关重要的表征，无论是前或后制造的光刻工具，新兴的二维半导体器件。该设施将被整合到赫瑞瓦特大学新翻新的洁净室中，该洁净室将容纳一系列补充设备。这将为众多博士生和早期职业生涯以及HWU和英国各地的知名学者提供新兴的2D光子学研究。该设施充分利用了Heriot-Watt光子学和量子科学研究所现有的卓越光子学研究，并且在两个EPSRC博士培训中心，两个英国量子技术中心和EPSRC激光生产过程创新制造中心内存在大量潜在的设施用户。该设施将实现四个具体的研究目标：1。二维量子光子学基于最近发现的嵌入在2D半导体中的量子发射器，“超越石墨烯”，可以产生非常广泛的电子和光学特性。新型器件的制造将推动这一令人兴奋的量子光子平台的发展。超薄光学器件由超颖表面制成，超颖表面是表现出不寻常光学特性的二维超材料。该设施将能够快速制造大规模超颖表面，以在一系列频率（例如可见光-太赫兹）上为潜在应用（例如显微镜，相机，显示器和移动的电话）创建“平面”光学器件。3.集成光子器件的制造，包括优化的单光子焦平面阵列、微透镜阵列、镶嵌滤波器、低损耗波导和用于量子、非线性和超快光子学的高质量腔。4.为各种新型薄膜和二维半导体材料和器件提供高分辨率表征。

Remarkable discoveries and advances in two-dimensional semiconductors beyond graphene, designer meta-surfaces, and integrated quantum or non-linear photonic devices are driving a revolution in optoelectronic and photonic technologies. The Two-Dimensional Photonics Fabrication Facility at Heriot-Watt University will facilitate this revolution in the UK with a user facility unique to the UK landscape. The centrepiece instrument, a "maskless" direct write laser, is a lithographic tool to rapidly fabricate large scale but bespoke 2D photonic devices with novel functionalities. The maskless laser writer bridges the gap in lateral resolution and write speed between electron beam lithography and conventional photolithography to enable rapid fabrication of nanoscale photonic devices over large areas. The unique lithography system will be augmented by an electron beam evaporator enabling deposition of high-quality metals and dielectrics with nanometre precision onto devices lithographically defined by the direct write laser. Finally, for the ultimate in thin-film, surface and materials metrology, a spectroscopic imaging ellipsometer will be used. This unique instrument is crucial for characterization, either pre- or post-fabrication by the lithographic tool, of emerging two-dimensional semiconductor devices. The facility will be integrated into the newly refurbished cleanroom at Heriot-Watt University housing an array of complementary equipment. This will underpin emerging 2D photonics research for numerous PhD students and early career and established academics at HWU and across the UK. The facility strongly leverages existing excellence in photonics research within the Institute of Photonics and Quantum Sciences at Heriot-Watt and a large cohort of prospective facility users exist within two EPSRC centres for doctoral training, two UK Quantum Technology Hubs, and the EPSRC Centre for Innovative Manufacturing in Laser Based Production Processes. Four specific research thrusts will be enabled by the facility:1. Two-dimensional quantum photonics based on recently discovered quantum emitters embedded in 2D semiconductors 'beyond graphene' that can produce a remarkably wide range of electronic and optical properties. Novel devices will be fabricated to drive forward this exciting emergent quantum photonic platform.2. Ultrathin optical devices made from metasurfaces, which are two-dimensional metamaterials exhibiting unusual optical properties. The facility will enable rapid fabrication of large-scale metasurfaces to create 'flat' optics for potential applications (e.g. microscopes, cameras, displays, and mobile phones) across a range of frequencies (e.g. visible - terahertz). 3. Fabrication of integrated photonics devices including optimized single photon focal plane arrays, microlens arrays, mosaic filters, low-loss waveguides, and high-quality cavities for quantum, non-linear, and ultra-fast photonics. 4. High-resolution characterization for a wide-range of novel thin film and two-dimensional semiconductor materials and devices.