Advanced Thin Film Sputtering Fabrication Facility (TF-FAB)

物理气相沉积方法是公认的用于工业应用的制造可重复和耐用涂层的技术。先进的薄膜溅射制造设备(TF-FAB)将提供最先进的设备，用于制造用于能量转换和存储、传感和生物医学设备的功能纳米和微涂层。TF-FAB是一种全自动双室磁控溅射系统。每个腔体将包括四个磁控管和相关电源、多条气体管线、用于局部掺杂的氦气注入、加热的大型衬底处理和衬底等离子体偏置。原位椭圆偏振测量仪将提供生长薄膜的重要光学信息。Tf-Fab将提供一个平台，以开发杂质和缺陷更少、密度更高、厚度更小以提高太阳能电池的效率或改善附着力、硬度和生物兼容性以延长整个关节置换植入物寿命的薄膜。Tf-Fab将在三个不同的领域进行影响研究：能源材料、生物兼容涂层和功能层。这包括以下材料和应用：-能源材料：硫系化合物PV，空穴和电子传输层，钠基和镁基存储，固态电解液，电极-生物兼容涂层：钛基高温合金，类金刚石涂层，抗菌薄膜-功能层：电流传感，超材料，透明导体，生物传感器，耐磨层该设施为研究人员提供了一个平台，来开发用于能源材料，生物兼容和功能涂层的新型无机薄膜。它支持诺森比亚大学最近在薄膜研究方面取得的前所未有的增长。TF-FAB是一个改变游戏规则的设施，适用于已经得到国际认可的研究领域，并在连续的裁判演习中产生影响。TF-FAB在薄膜制造方面提供了变革性的产能增加，并将在学术界和产业界之间创造新的合作机会，为快速筛选新材料提供独特的材料范围，具有高产量和重复性。它与“材料制造”和“现场测试和表征”领域下的工程研究基础设施路线图保持一致，以供进一步投资。这些领域与先进材料领导委员会的先进材料战略一致，特别是“用于健康的材料”和“用于能源的材料”。TF-FAB将支持能源材料、电气和生物功能涂层的研究，这些涂层与EPSRC的繁荣成果相一致，例如“健康的”和“有弹性的”国家，以及包括“先进材料和制造”、“能源和环境技术”在内的几项英国创新战略技术。该系统将用于生产用于光伏的金属和透明导电氧化物和电介质、燃料电池和电池的电极材料、高温合金、电气传感和生物兼容薄膜，这些薄膜包括战略重点，如“工程净零”、“改变健康”、“工程、制造和技术”及相关主题的前沿。

Physical vapour deposition methods are recognised techniques to fabricate reproducible and durable coatings for industrial applications. The Advanced Thin Film Sputtering Fabrication Facility (TF-FAB) will provide a state-of-the-art facility for the fabrication of functional nano and micro-coatings for energy conversion and storage, sensing and biomedical devices. TF-FAB is a fully automated dual chamber magnetron sputtering system. Each chamber will include four magnetrons and associated power supplies, multiple gas lines, helium gas injection for localised doping, large substrate handling with heating and substrate plasma bias. In-situ ellipsometry will provide vital optical information of the growing films. TF-FAB will provide a platform to develop films with fewer impurities and defects, higher density, reduced thickness to increase the efficiency of solar cells or improved adhesion, hardness and biocompatibility to increase the lifetime of a total joint arthroplasty implants.TF-FAB will enable impact research in three distinctive areas: energy materials, biocompatible coatings and functional layers. This includes the following materials and applications:-Energy materials: Chalcogenides PV, hole and electron transport layers, Na- and Mg-based storage, Solid state electrolyte, electrodes-Biocompatible coatings: Ti-based super alloys, diamond like coatings, antimicrobial films-Functional layers: current sensing, metamaterials, transparent conductors, biosensors, wear resistantThe facility provides a platform for researchers to develop new inorganic thin films for energy materials, biocompatible and functional coatings. It supports unprecedented recent growth in thin film research at Northumbria University. TF-FAB is a game-changing facility for research areas that have been recognised internationally and have delivered impact at successive REF exercises. TF-FAB provides a transformational capacity increase in thin film fabrication and will create new collaborative opportunities between academia and industry for the rapid screening of new materials offering a unique breadth of materials range with high throughput and reproducibility.TF-FAB will directly support research which fits with the UK and regional 'clean growth' and 'ageing society' grand challenges. It aligns with the Engineering Research Infrastructure Roadmap under 'Materials fabrication' and also 'In-situ testing and characterisation' areas for further investment. These areas align with the Advanced Materials strategy from the Advanced Materials Leadership Council, in particular 'Materials for Health' and 'Materials for Energy'. TF-FAB will support research in energy materials, and electrical and bio-functional coatings which align with EPSRC prosperity outcomes such as 'healthy' and 'resilient' nation as well as several of the UK Innovation Strategy technologies including 'Advanced Materials and Manufacturing', 'Energy and Environment Technologies'. The system will be used to produce metal and transparent conductive oxides and dielectrics for photovoltaics, electrode materials for fuel cells and batteries, super alloys, electrical sensing and biocompatible films encompassing strategic priorities such as 'engineering net zero', 'transforming health' and frontiers in 'engineering, manufacturing and technology' and associated themes.