High Performance Laser Scribing of Advanced Thin Film Materials

先进薄膜材料的高性能激光划片

• 批准号: 1903740
• 负责人: Shuting Lei
• 金额: $ 29.01万
• 依托单位: Kansas State University
• 依托单位国家: 美国
• 项目类别: Standard Grant
• 财政年份: 2019
• 资助国家: 美国
• 起止时间: 2019-09-01 至 2024-08-31
• 项目状态: 已结题
• 来源: https://www.nsf.gov/awardsearch/showAward?AWD_ID=1903740&HistoricalAwards=false
• 关键词: Performance; Laser; Scribing; Advanced; Thin

Thin film materials have broad application in electronics, light source, renewable energy, sensors, mechanical systems, etc. With the emergence of new thin film structures there is increasing demand for high performance laser scribing techniques capable of producing narrow ( 10 micron), straight walled cuts with little imparted surface damage. The research aims to address this challenge at the fundamental level by studying the laser-matter interaction mechanisms under a new laser double pulse irradiation strategy for thin film scribing. The basic research from this project will generate scientific knowledge to enable the development of high performance laser scribing techniques that can find application in numerous advanced technology areas including scribing of solar cells and smart window glass, patterning of flexible electronics, micromachining of microelectromechanical systems and light emitting diodes, etc. In the solar industry, for example, recent years have seen tremendous progress in thin film solar photovoltaics, especially perovskite solar cells exceeding 20 percent power conversion efficiency. The research could accelerate the adoption of thin film solar technology and contribute to a clean energy future free of air pollution, hazardous waste, and negative environmental impact. Besides potential industrial and societal benefits, engaging educational materials and activities derived from the project will be developed to train a diverse group of undergraduate and graduate students, and to educate both K-12 students and the public. The principle investigator will take advantage of the new laser micromachining infrastructure to involve students from underrepresented groups in the project. The research will verify that a femtosecond-picosecond double pulse irradiation will create a uniform critical electron number density through multiphoton absorption and avalanche ionization and enable a narrow thin film scribe with high surface integrity. The research objective is to identify the parameter window for pulse energy and time delay, and determine the laser-matter interaction mechanisms under this double pulse irradiation scheme. A combined experimental and numerical modeling approach will be used to verify the approach and to gain a deep understanding of electron dynamics and ablation mechanisms in a thin film structure when irradiated by a femtosecond-picosecond pulse train. The basic technical approach is to develop a numerical model to predict the free carrier density and the resulting ablation shape, while a model-based approach will be used to design and conduct thin film scribing experiments. This research will contribute to the scientific community by advancing the fundamental understanding of laser-matter interaction with advanced thin film materials.This award reflects NSF's statutory mission and has been deemed worthy of support through evaluation using the Foundation's intellectual merit and broader impacts review criteria.

薄膜材料在电子，光源，可再生能源，传感器，机械系统等方面具有广泛的应用。随着新薄膜结构的出现，人们对能够产生狭窄的高性能激光涂鸦技术的需求不断增加（10微米），直壁切割，几乎没有施加表面损害。该研究旨在通过研究新的激光双脉冲辐照策略来解决薄膜涂鸦的新激光双脉冲辐照策略，以解决基本水平的这一挑战。该项目的基础研究将产生科学知识，以使高性能激光涂鸦技术的发展可以在许多先进的技术领域中找到应用，包括涂抹太阳能电池和智能窗玻璃，柔性电子设备的图案，微机械机械系统的微机械，微机械系统的微机械系统以及尤其是在太阳能工业中的光发射的效果，例如，在太阳能行业中，薄弱的效果在薄弱的过程中，薄弱的效果，这些效果是薄弱的，这些效果是薄弱的，薄弱的效果是薄弱的。太阳能电池超过20％的功率转换效率。这项研究可以加速采用薄膜太阳能技术，并为清洁能源带来未来，没有空气污染，危险废物和负面影响。除了潜在的工业和社会福利外，还将开发从该项目衍生的教育材料和活动，以培训各种各样的本科生和研究生，并教育K-12学生和公众。主要研究人员将利用新的激光微加工基础设施，以使来自代表性不足小组的学生参与该项目。该研究将验证飞秒二秒双脉冲辐照将通过多光子吸收和雪崩电离产生均匀的临界电子密度，并启用具有高表面完整性的狭窄薄膜抄写物。研究目标是确定脉冲能量和时间延迟的参数窗口，并在此双重脉冲照射方案下确定激光 - 肌电相互作用机制。当通过飞秒二秒脉冲脉冲训练时，将使用合并的实验和数值建模方法来验证方法并深入了解薄膜结构中的电子动力学和消融机制。基本的技术方法是开发一个数值模型，以预测自由载体密度和所得的消融形状，而基于模型的方法将用于设计和进行薄膜涂鸦实验。这项研究将通过促进对激光胶片材料的激光互动的基本理解来为科学界做出贡献。该奖项反映了NSF的法定任务，并通过使用基金会的知识分子优点和更广泛的影响审查标准，认为值得通过评估值得支持。

项目成果

Numerical modeling and simulation of ultrafast laser-matter interaction with aluminum thin film

超快激光-物质与铝薄膜相互作用的数值建模与模拟

• DOI: 10.1016/j.procir.2022.08.152
• 发表时间: 2022
• 期刊: Procedia CIRP
• 作者: Lei, Shuting;Wang, Xinya;Larsen, Jon T.
• 通讯作者: Larsen, Jon T.

Laser Scribing of Photovoltaic Solar Thin Films: A Review

• DOI: 10.3390/jmmp7030094
• 发表时间: 2023-05
• 期刊: Journal of Manufacturing and Materials Processing
• 影响因子: 3.2
• 作者: Farzad Jamaatisomarin;Ruqi Chen;Sajed Hosseini-Zavareh;S. Lei

A layer-by-layer quality monitoring framework for 3D printing

• DOI: 10.1016/j.cie.2021.107314
• 发表时间: 2021-04-29
• 期刊: COMPUTERS & INDUSTRIAL ENGINEERING
• 影响因子: 7.9
• 作者: Bisheh, Mohammad Najjartabar;Chang, Shing, I;Lei, Shuting
• 通讯作者: Lei, Shuting

Curved waveguides in silicon written by a shaped laser beam

• DOI: 10.1364/oe.419074
• 发表时间: 2021-05-10
• 期刊: OPTICS EXPRESS
• 影响因子: 3.8
• 作者: Wang, Xinya;Yu, Xiaoming;Lei, Shuting
• 通讯作者: Lei, Shuting