SURFACE SCANNING USING NEAR-FIELD MICROWAVE MICROSCOPY

该项目将雷尼绍在制造和计量领域的世界级专业知识与卡迪夫高频工程中心相结合，利用近场微波显微镜对金属结构进行机后验证。我们将重点关注那些难以使用传统方法（如坐标测量机（CMM））进行评估的结构。利用微波探针尖端与样品的电场相互作用，我们将能够评估（精确度极高）与尖端到表面距离相关的小电容变化，从而评估表面形态。预计微波测头可以集成到雷尼绍的商用三坐标测量机中，提供无与伦比的多功能性。

This project combines the world class expertise of Renishaw in manufacturing and metrology with Cardiff's Centre for High Frequency Engineering, using near field microwave microscopy for post machine verification of metal structures. We will focus on structures that would be otherwise difficult to assess using traditional methods such as coordinate measurement machines (CMM). Using the electric field interaction with the sample at the microwave probe tip, we will be able to assess (with exquisite accuracy) small capacitance changes associated with tip-to-surface distance and hence surface morphology. It is expected that the microwave probe could be incorporated into Renishaw's commercial CMMs, to offer unparalleled versatility.