Commercially Viable Wide-Band Ultrasound Arrays Based on CMUT Technology

描述(由申请人提供)：计划的目标是(在第一阶段)解决几个技术可行性问题，然后(在随后的第二阶段)展示将Sonetics的突破性CMUT-in-CMOS型超声换能器技术整合到一种适合商业应用的新型高性能2D超声阵列中。第一阶段的具体目标将调查2D阵列元件的带宽改善、片上读出电路的缩放和增强，以及与器件膜密封层相关的介质充电效应的减少。这一阶段将以单元2D阵列原型的制造和表征为高潮，该原型将用于评估更大规模阵列的成像潜力。适用于实时3D成像的原型扫描头(包括128x128元素CMUT阵列)的全面实施将在第二阶段演示，长期目标是将这项技术(以及其他基于CMUT-In-CMOS的产品)商业化，用于超声设备市场，预计到2010年全球市场将达到37.5亿美元。这一市场的学术领域将受益于全填充2D超声阵列的实际实现，这将提高用于疾病诊断的3D成像的质量和速度。此外，基于CMUT的扫描头可以降低许多最先进的超声系统的最大成本元素，同时显示出更好的成像能力，这将为研究人员和学生提供更多机会对生命系统进行实时的活体研究-从成本、可用性和便利性的角度来看，3D超声具有独特的优势(例如，与MRI、PET或CT相比，所有这些都需要昂贵的专用设备和技术人员)。临床市场也将获得类似的收益，因为3D超声提供了安全、方便、实时的成像技术-实现了更好的分诊和更好的患者结果，更低的成像成本，以及更少的人员需求，所有这些都将很好地服务于美国医疗行业，因为它寻求控制飙升的成本。 与公共健康相关：Sonetics的新型超声换能器技术的成功开发对公共健康的潜在好处包括：提高了用于疾病诊断的高质量3D医学成像的可用性和可负担性；随着低成本的3D超声进入课堂，改善了医疗培训；随着更好的超声改善临床分类和患者预后，降低了整个社会的医疗成本。此外，超声波是唯一有潜力成为一种方便、安全、实时成像工具的技术，用于低收入医疗诊所等预算有限的设施。

DESCRIPTION (provided by applicant): The goal of the proposed program is to address several technical feasibility questions (in Phase I), and then demonstrate (in a subsequent Phase II) incorporation of Sonetics' groundbreaking CMUT-in-CMOS ultrasound transducer technology into a novel, high-performance 2D ultrasound array suitable for commercial applications. Phase I specific aims will investigate bandwidth improvement for 2D array elements, scaling and enhancement of on-chip readout circuits, and reduction of dielectric charging effects related to device membrane sealing layers. This phase will culminate with the fabrication and characterization of a 64-element 2D array prototype, which will be used to evaluate the imaging potential of a larger scale array. Full implementation into a prototype scanhead (including a 128x128 element CMUT array) suitable for real-time 3D imaging would be demonstrated in Phase II, with the long-term goal of commercializing the technology (as well as other CMUT-in-CMOS-based products) for the ultrasound equipment market, forecast to be $3.75B globally by 2010. The academic segment of this market would benefit from the practical realization of fully-populated 2D ultrasound arrays, which will improve the quality and speed of 3D imaging for disease diagnosis. As well, the potential of CMUT-based scanheads to reduce the largest cost element of many state-of-the-art ultrasound systems, while simultaneously exhibiting improved imaging capability, will provide increased opportunity for researchers and students to undertake real-time, in vivo studies of living systems-something 3D ultrasound is uniquely positioned to do from a cost, availability, and convenience perspective (vs. MRI, PET, or CT, for example, all of which require expensive, dedicated facilities and technicians). The clinical market stands to gain similarly, as 3D ultrasound provides safe, convenient, real-time imaging technology-enabling improved triage and better patient outcomes, lower-cost imaging, and reduced staffing needs, all of which will serve the U.S. healthcare industry well as it seeks to control skyrocketing costs. PUBLIC HEALTH RELEVANCE: Potential benefits to public health from the successful development of Sonetics' novel ultrasound transducer technology include: improved availability and affordability of high-quality 3D medical imaging for disease diagnosis; improved medical training as low-cost 3D ultrasound enters the classroom; and lowered health-care costs for society as a whole, as better ultrasound improves clinical triage and patient outcomes. Furthermore, ultrasound is the only technology with the potential to become a convenient, safe, real-time imaging tool for use in limited-budget facilities such as lowincome health clinics.