A vision-based micromanipulation system for autonomous inspection and assembly of micro-parts

该设备包括一个带探针的微机械臂、一个摄像头、一个力反馈装置、一个触觉装置、一个路由器、数据采集卡和辅助软件。拟议的设备将与申请人现有的设备集成，为瑞尔森大学甚至其他大学的研究人员提供一个具有远程操作能力的基于视觉的自主微操作设备，这是一个最先进的多功能实验设备。该设施将主要用于支持研究项目，重点是测试新的基于图像的检测、操作和远程操作方法，用于微观尺度的物体。随着微技术的快速发展，自主微操作成为检测、构建和组装大量微物体如微机电系统（MEMS）产品和生物元件的新兴兴趣。上述研究计划将利用所提出的实验设备进行以下主题的研究：(1)基于视觉控制方法的性能分析和基于混合力-视觉控制策略的鲁棒视觉伺服控制系统的开发，用于微尺度物体的微操作；(2)基于互联网的力反射式视觉伺服远程微操纵遥控制导系统的研制；(3)微结构、微电子元件、微观生物结构和MEMS产品的设计、检测和测试。除了申请者和共同申请者外，研究生和大四本科生将通过开发微尺度检测和组装技术来学习新兴的基于视觉的MEMS技术和实验。此外，开发的设备可用于制造模板和微型设备的原型。这个新设施将进一步扩大瑞尔森在多学科领域的研究和教育，重点关注机械、电气和生物医学工程之间的新兴机会。

The proposed equipment consists of a micromanipulator with probes, a camera, a force feedback device, a haptic device, a router, data acquisition cards, and auxiliary software. The proposed equipment will be integrated with the applicant's existing equipment to provide a vision-based autonomous micromanipulation facility with teleoperation capability, a state-of-the-art and versatile experimental facility for researchers at Ryerson and, even, other universities. The facility will be primarily used to support research programs focusing on testing new image-based inspection, manipulation, and teleopration methods for objects in micro-scale. With the rapid growth of micro-technology, autonomous micromanipulation becomes an emerging interest in inspecting, constructing and assembling micro-objects in large volume such as microelectromechanical systems (MEMS) products and biological elements.    The following topics will be tackled in the aforementioned research programs using the proposed experimental facility: (1) performance analysis of vision-based control methods and development of a robust visual servo-control system with a hybrid force-vision control strategy for micromanipulation of objects in micro-scale; (2) development of an Internet-based telerobotic control and guidance system with force-reflective visual servo-control for tele-micromanipulation; and (3) design, inspection, and test of micro-structures, micro-electronic components, microscopic biological structures, and MEMS products.      In addition to the applicant and co-applicants, graduate and senior undergraduate students will use this facility to learn emerging vision-based MEMS technology and experiments by developing micro-scale inspection and assembly techniques. Furthermore, the developed facility could be used for fabricating templates and prototyping micro-devices. This new facility will further expand Ryerson's research and education in multi-disciplinary areas, focusing on emerging opportunities at the interfaces between mechanical, electrical, and biomedical engineering.