contact stylus profiler for materials and MEMS devices metrology

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Metrology is a critical validation step of the microfabrication processes and is essential for many studies in materials science. Because microfabrication implies multiple process steps, it is important to control the quality at all stages to be able to achieve a complete device. The requested instrument is a stylus profiler. By scanning a tip in contact with the surface of a substrate, we can get information on its topography. The information we can obtained from the collected data are the surface roughness, the height of a thin film deposited on a substrate, the depth a etched trench, the stress of a film or the planarity of the surface. Primarily oriented for microfabrication process control and characterization, including thin film deposition, the instrument will be installed in a cleanroom. The instrument will be managed by the Thin Film Research Labs which are central facilities accessible to all researchers. The stylus profiler will be use for bioMEMS, microfluidics, optical MEMS, thin film material properties analysis and erosion testing.