contact stylus profiler for materials and MEMS devices metrology

计量是微加工过程的关键验证步骤，在材料科学的许多研究中都是必不可少的。由于微加工意味着多个工艺步骤，因此控制所有阶段的质量以实现完整的器件是很重要的。所要求的仪器是触控笔分析器。通过扫描与基材表面接触的尖端，我们可以得到基材表面的形貌信息。我们可以从收集到的数据中获得的信息是表面粗糙度，沉积在衬底上的薄膜的高度，蚀刻沟的深度，薄膜的应力或表面的平面度。该仪器主要面向微加工过程控制和表征，包括薄膜沉积，将安装在洁净室中。该仪器将由薄膜研究实验室管理，该实验室是所有研究人员都可以使用的中心设施。该仪器将用于生物机械系统、微流体、光学微机电系统、薄膜材料性能分析和腐蚀测试。

Metrology is a critical validation step of the microfabrication processes and is essential for many studies in materials science. Because microfabrication implies multiple process steps, it is important to control the quality at all stages to be able to achieve a complete device. The requested instrument is a stylus profiler. By scanning a tip in contact with the surface of a substrate, we can get information on its topography. The information we can obtained from the collected data are the surface roughness, the height of a thin film deposited on a substrate, the depth a etched trench, the stress of a film or the planarity of the surface. Primarily oriented for microfabrication process control and characterization, including thin film deposition, the instrument will be installed in a cleanroom. The instrument will be managed by the Thin Film Research Labs which are central facilities accessible to all researchers. The stylus profiler will be use for bioMEMS, microfluidics, optical MEMS, thin film material properties analysis and erosion testing.