Automated ultrasonic coating system for micro/nanodevices

本研究工具和仪器应用中要求的自动化超声波涂层系统将用于支持滑铁卢大学先进微/纳米设备实验室(AMND)的研究计划。目前，该实验室专注于了解、建模、设计、集成和开发功能微/纳米设备的所有方面。所有在实验室设计的微/纳米设备都需要涂层以用于保护、传感或密封目的。此外，该系统还将是用于制造微型传感器和执行器的关键设备。所提出的系统能够在任何衬底上均匀地喷涂化学或生物制剂和纳米材料。可以沉积纳米材料或薄膜，如纳米管或对二甲苯，作为生物兼容的密封层。此外，DNA和蛋白质等生物制剂可以均匀沉积，作为微/纳米设备的感应层。

The automated ultrasonic coating system requested in this Research Tools and Instruments application will be used to support the research program of the Advanced Micro/NanoDevices Lab (AMND) at the University of Waterloo. Currently, the lab is focused on understanding, modeling, designing, integrating, and developing all aspects of functional micro/nanodevices. All micro/nanodevices designed in the lab will require a coating layer for protection, sensing, or sealing purposes. In addition, the system will also be a critical piece of equipment that will be used for fabrication of microsensors and actuators. The proposed system is capable of uniformly spray coating any substrate with chemical or biological agents and nanomaterials. Nanomaterials or thin films such as nanotubes or parylene can be deposited to serve as a biocompatible sealing layer. In addition, biological agents such as DNAs and proteins can be uniformly deposited to serve as a sensing layer for micro/nanodevices.