Precision Micromachining of 3D Components with Micro/Nano-Scale Features

组件小型化越来越受到广泛产品的关注，以实现改进的性能、增加的多功能、更多的定制、更好的适销性、节省重量、成本和空间等。组件小型化也允许新产品出现，因为进一步小型化的产品可以为新的应用打开大门。用于制造微纳米级原型的典型光刻和MEMS工艺面临挑战，可能导致代价高昂的延迟，包括缓慢而昂贵的工艺（通常需要数月）；而且，它们的使用仅限于几种材料，主要是硅基材料。目前的机械微加工行业实践严重依赖传统的数控加工技术，导致高资金投入，高能源和维护成本，非最佳切削条件和低效率的工艺。此外，目前，对微观尺度的切削力学和机制的理解，对复杂3D几何形状有效制造的工艺规划和夹具的专业知识，以及微加工过程控制技术（如刀尖检测和切削液应用）的开发仍然非常有限。

Component miniaturization is gaining more attention for a broad spectrum of products to achieve improved performance, increased multi-functionality, more customization, better marketability, savings in weight, cost, and space, etc. Component miniaturization also allows new products to emerge because further miniaturized products can open doors for new applications. The typical photolithographic and MEMS processes for fabricating micro and nano-scale prototypes have challenges that can result in costly delays, including slow and expensive processes (often taking months); and, their use is limited to a few, mainly silicon-based, materials. Current mechanical micromachining industry practice relies heavily on conventional CNC machining technologies, resulting in high capital investment, high energy and maintenance cost, non-optimal cutting conditions and inefficient processes. Also currently, understanding of the cutting mechanics and mechanisms at the micro-scale, know-how on process planning and fixturing for effective fabrication of complex 3D geometries, and development of process control technologies such as tool tip detection and cutting fluid application for micro-machining are still very much limited.