Development of new technologies for the characterization of materials at high spatial resolution in field emission scanning electron microscopy

扫描电子显微镜（SEM）制造商继续推动SEM的能力，改进电子探测器并开发新型附件。开启显微镜新时代所缺少的是应用和开发新分析技术的例子，这些技术使用了像日立加拿大这样的SEM制造商的新开发。该CRD研究提案提出了具体的应用，通过结合申请人的专业知识和日立加拿大新的SEM能力和专业知识来改进和开发分析技术。该提案旨在解决四个问题：开发新的纳米材料的一个问题是准确地知道每个小特征的组成;使用纳米处理剂或纳米填料如CNT对生物和软材料进行高分辨率成像和组成分析;通过使用任何可用的电子和X射线检测器来观察材料的真实表面以评估其微观结构的表面污染和损伤;理解纳米材料在实验过程中的机械性能，即，现场观察和表征。 项目大纲和目标 证明了在新的SU 8230冷场扫描电镜中可以进行定量X射线显微分析，该扫描电镜配备了自动闪光技术和新的环形探测器，可在低和中等加速电压下进行。(1)在SEM/STEM 30 kV和低压体中开发高分辨率X射线显微分析的新定量方法，并对非均匀样品进行Monte Carlo模拟。开发一种用于同时透射EBSD分析和定量X射线显微分析的新型STEM样品保持器。(2)这些材料与离子液体的高分辨率成像和定量x射线显微分析的演示。(3)专家系统优化使用平面离子铣削和臭氧清洁器。使用离子铣削系统制备用于STEM观察的薄膜。(4)使用LifeForce开发纳米柱和纳米线的应力应变测量。使用LifeForce开发材料的纳米压痕测量。开发扫描电子显微镜内微米物体操作的应用示例。

Scanning electron microscope (SEM) manufacturer continue to push the capability of the SEM, improve the electron detectors and develop novel attachments. What is missing to start a new era in microscopy are examples of application and development of new analysis techniques that use this new development from SEM manufacturer like Hitachi Canada. This CRD research proposal proposes specific applications, to improve and develop analysis techniques by combining the applicant expertise and Hitachi Canada new SEM capabilities and know-how. This proposal aim to address four problems: one problem of developing new nanoscale materials is to know accurately the composition of each small feature; high resolution imaging and composition analysis of biological and soft materials with nanoscale treating agents or nano-fillers like CNT; surface contamination and damage to observe the true surface of materials by using any of the available electron and x-ray detectors to assess their microstructure; understanding of the mechanical properties of nano-materials during the experiment, i.e., in-situ observation and characterization. Project outline and goals Demonstration that quantitative x-ray microanalysis is possible in the new SU8230 cold field SEM with the auto-flash technology equipped with the new annular detector at low and medium accelerating voltage. (1) Development of new quantitative methods for high resolution x-ray microanalysis in SEM/STEM 30 kV and low voltage bulk with Monte Carlo simulations for heterogeneous specimen. Development of a new STEM specimen holder for simultaneous transmission EBSD analysis and quantitative x-ray microanalysis. (2) Demonstration of high resolution imaging and quantitative x-ray microanalysis with these materials with ionic liquids. (3) Expert system for optimum use of Flat Ion Milling and Ozone cleaner. Preparation of thin films for STEM observation with the Ion Milling system. (4) Development stress-strain measurement of nanopilars and nanowires with the LifeForce. Development nano-indentation measurement of materials with LifeForce. Development of application example of manipulation of micrometer objects inside the SEM.