High-performance silicon Photonic NEMS devices for communication networks

硅光子学作为一种具有成本效益的技术，正在迅速获得业界的认可，用于构建用于数据通信网络的光学元件。硅光子波导非常紧凑，具有几百纳米的非典型宽度，并且可以使用传统的cmos微电子工艺制造，这允许低成本制造光学元件并在同一芯片上大规模集成电子元件。本研究旨在证明纳米机电结构（NEMS）与硅纳米光子波导集成的可行性，以执行重要的数据通信功能，如开关和调制。该技术在高速和低功耗方面可以提供比现有硅光子器件更优越的性能。与传统的微机电系统（MEMS）相比，基于nems的硅光子器件也更加紧凑，这允许在同一芯片上大规模集成光子集成电路和cmos微电子器件。合作的行业伙伴是精密微技术公司，一家总部位于埃德蒙顿的mems产品和服务提供商。凭借其在MEMS设计和制造方面的广泛专业知识，该公司有能力利用通过该项目开发的硅光子NEMS技术，并促进其向市场的转移。除了给行业合作伙伴带来商业利益外，该项目还有望通过开发硅光子学和nems技术的本土专业知识，以及培训微/纳米技术和电信部门的高素质人才，使加拿大受益。

Silicon photonics is rapidly gaining industry acceptance as a cost-effective technology for building opticalcomponents for data communication networks. Silicon photonic waveguides are extremely compact, with atypical width of a few hundred nanometers, and they can be fabricated using conventional CMOSmicroelectronics process, which allows for low-cost manufacturing of optical components and large-scaleintegration with electronics on the same chip. This research aims to demonstrate the feasibility of integratingnanoscale electromechanical structures (NEMS) with silicon nanophotonic waveguides to perform importantdata communication functions, such as switching and modulation. The technology could offer superiorperformance over existing silicon photonic devices in terms of high speed and low power consumption.Compared to conventional micro-electromechanical systems (MEMS), NEMS-based silicon photonic devicesare also much more compact, which allows for large-scale integration with photonic integrated circuits andCMOS microelectronics on the same chip.The collaborating industry partner is Preciseley Microtechnology Corp., an Edmonton-based provider ofMEMS products and services. With its extensive expertise in MEMS design and manufacturing, the companyis well-positioned to exploit the silicon photonic NEMS technology developed through this project andfacilitate its transfer to the market. In addition to the commercial benefits to the industry partner, the project isalso expected to benefit Canada through the development of home-grown expertise in silicon photonics andNEMS technologies, as well as the training of highly qualified personnel in the micro/nanotechnology andtelecommunication sectors.