New Analytical Techniques using Electron Microscopy for Nano-Materials Characterization in the 0.5 - 30 keV Range

该CRD旨在利用申请人于2017年通过CFI获得的新型SU-9000 CFE-SEM以及SU-8230 CFE-SEM进一步开发表征技术。SU 9000显微镜提供了先进的STEM功能，特别是在特定的新的传输模式探测器，如明场（BF）和暗场（DF）探测器，会聚束电子衍射（CBED）的轴上衍射相机和独特的低电压电子能量损失谱仪（EELS）的形式。(1)将研究20和30 kV等低电压下的EELS技术，以了解低束能量对其操作的影响及其局限性，从而提高其对各种材料的适用性。进一步降低低于20千伏的电子束能量的可能性将被调查。(2)定量低电压CBED应用于几个晶体系统将进行研究，提出一个方便的程序，使用这种新的SEM技术，以及应用后处理技术，以产生有用的结果与该技术，这是缺乏现在。也将评估其局限性。(3)布鲁克公司的新型e-Flash高分辨率电子背散射衍射（EBSD）相机，安装在SU 8230上，也将进行测试，以确定其在最先进的SEM中以STEM模式提供CBED的能力。(4)最后，由于SU 9000配备了牛津仪器公司的新型无窗极限X射线探测器，因此将在软X射线（0 - 1 kV）范围内开发极低电压X射线微量分析，因为该能量范围最有利于这种类型探测器上没有保护窗的情况。

This CRD aims to further develop characterization techniques with the new SU-9000 CFE-SEM acquired by the applicant in 2017 via a CFI as well as on the SU-8230 CFE-SEM. The SU9000 microscope provides advanced STEM capabilities, especially in the form of specific new transmission mode detectors such as bright-field (BF) and dark-field (DF) detectors, an on-axis diffraction camera for convergent beam electron diffraction (CBED) and a unique low voltage electron energy-loss spectrometer (EELS). (1) The EELS technique at low voltages such as 20 and 30 kV will be studied to understand the impact of low beam energy on its operation and its limitations in order to improve its applicability to a wide range of materials. The possibility of reducing further the beam energy below 20 kV will be investigated. (2) Quantitative low voltage CBED applied to several crystalline systems will be studied to propose a convenient procedure to use this new SEM technology as well as apply post-processing techniques to produce useful results with the technique, which are lacking for now. Its limitations will be assessed as well. (3) The new e-Flash high-resolution electron backscatter diffraction (EBSD) camera from Bruker Inc., installed on the SU8230, will also be tested to define its ability in providing CBED in STEM mode in a state-of-the-art SEM. (4) Finally, since the SU9000 is fitted with the new windowless Extreme x-ray detector from Oxford Instruments, very low voltage x-ray microanalysis will be developed in the range of soft x-rays (0 - 1 kV) since this energy range benefits the most of the absence of a protective window on this type of detectors.