电场调控的磁电耦合巨磁阻抗传感器研究

巨磁阻抗（GMI）传感器具有灵敏度高、尺寸小、功耗低等优势，在生物医药、地磁导航等领域具有巨大的应用潜力。近年来，随着磁性传感器微型化、集成化的发展，薄膜型GMI传感器成为研究热点。由于薄膜GMI传感器存在调控难、效应弱的问题，因此本项目从“横向磁导率”影响GMI效应这一基本思路出发，通过应力传导的磁电耦合效应实现薄膜GMI效应的增强及电学调控。本项目从磁电耦合体系中磁性薄膜的磁致伸缩、各向异性及压电材料的振动模式等参数入手，调控Fe基软磁薄膜和压电材料的磁电耦合效应，实现电场对磁性薄膜磁化翻转的控制。当翻转方向能够沿“横向”时，将提高薄膜的横向磁导率，进而实现GMI效应的电调控。以上工作的开展，能够极大简化薄膜GMI效应的调控手段，提高薄膜GMI传感器的灵敏度，为薄膜GMI传感器的发展提供新的思路和方法。

Giant magnetoimpedance (GMI) effect with high sensitivity, small size and low cost, is a kind of high resolution of magnetic field detection technology which could be used in biological medicine, earth-magnetism navigation and some other interdiscipline subjects. With the rapid development of film technology, the size of magnetic sensors is project to micro/nano-scale, which turns to hot spot. This research is based on the fundamental understanding that transverse permeability plays an important role to GMI effect, therefore a newly developed technique that introducing the magnetoelectric is developed. Tensile mediated magnetoelectric is an effective method which is expected to regulate and enhance GMI effect by applied a voltage on piezoelectric substrate. Based on the magnetoelectric effect, the magnetization could be regulated by changing the magnetostriction, magnetic anisotropy of magnetic film and vibration mode of piezoelectric film. When the direction of magnetization is reoriented along the transverse, the GMI effect could be regulated and strengthened. Thus, this work is of much interest both for the improvement of GMI effect and for the development and application of GMI magnetic sensors.