Electrostatic levitation: an elegant method to control MEMS switching operation
Electrostatic levitation: an elegant method to control MEMS switching operation
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静电悬浮：一种控制 MEMS 开关操作的优雅方法
DOI：
10.1007/s11071-021-06499-9
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发表时间：
2021
影响因子：
5.6
通讯作者：
Towfighian, Shahrzad
中科院分区：
文献类型：
--
作者：
Mousavi, Mohammad;Alzgool, Mohammad;Towfighian, Shahrzad
研究了一种利用两侧电极打开常闭开关的微动开关的特性。侧电极以公知的间隙闭合电极配置围绕固定电极。侧电极可以打开闭合的开关，并被调谐以适当地响应外力。组合电极系统显著地改进了标准间隙闭合电极配置的控制。在常规开关中，高于特定值的DC电压闭合开关。为了重新打开开关，电压差减小以剥离移动电极。目前，接触区域被仔细设计以避免静摩擦，但随着时间的推移和静摩擦力的退化可能导致永久性故障。在这项工作中，通过向侧电极馈送超过一定值的电压而产生开路，该电压导致悬浮力。即使表面发生退化，开关也可以通过增加侧电压来打开。分析了组合驱动系统的静态吸合、静态位移、释放电压、动态吸合、频率响应和吸引域等特性。实验结果验证了该方法的有效性。基于悬浮的微型开关提高了系统的可调谐性，因为灵敏度和开关阈值可以调节。
This paper investigates the characteristics of a micro-switch that uses two side electrodes to open a normally closed switch. The side electrodes surround the fixed electrode in the well-known gap-closing electrode configuration. The side electrodes can open a closed switch and be tuned to respond appropriately to outside forces. The combined electrode system dramatically improves the control of a standard gap-closing electrode configuration. In conventional switches, a DC voltage above a certain value closes the switch. To reopen the switch, the voltage difference is reduced to peel off the moving electrode. Currently, the contact area is carefully designed to avoid stiction, but the degradation over time and stiction forces can cause a permanent failure. In this work, opening occurs by feeding the side electrodes a voltage beyond a certain value that results in a levitation force. Even if the degradation in the surfaces happens, the switch can open by increasing the side voltages. The characteristics of the combined actuation system are thoroughly analyzed and include the static pull-in, static displacement, release voltage, dynamic pull-in, frequency response, and basins of attraction. The results are validated by the experimental tests. The levitation-based micro-switch improves the system tunability as the sensitivity and switching thresholds can be adjusted.
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