Improved p-type conductivity and acceptor states in N-doped ZnO thin films

Improved p-type conductivity and acceptor states in N-doped ZnO thin films
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N 掺杂 ZnO 薄膜中 p 型电导率和受主态的改善

DOI:
10.1088/0022-3727/40/10/022
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发表时间:
2007-05
影响因子:
3.4
通讯作者:
Liang, Qunian
Liang, Qunian
中科院分区:
物理与天体物理3区
文献类型:
--
作者:
Lu, Jianguo;Fujita, Shizuo;Zhang, Yinzhu;Ye, Zhizhen;Liang, Qunian

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以NO为氮掺杂源,采用磁控溅射法制备了N掺杂p型ZnO(ZnO:N)薄膜。在生长气氛中引入Ar可以显著提高ZnO:N薄膜的p型导电性和晶体质量,在Ar分压为30%时,ZnO:N薄膜的室温电阻率最低,为3.51 Ω cm。p型ZnO:N薄膜具有很高的光学质量,由温度依赖的光致发光谱表明。从自由态到中性受体态(e,A0)的跃迁中确定了能级为180 meV的N-O取代受体态.从中性受体束缚激子和自由激子的发射导出N O受体束缚激子的结合能为17 meV。ZnO中NO受体的Haynes因子约为0.094。在ZnO:N中,除了N O受主外,还发现了一个能级为255 meV的Zn空位(V Zn)受主态,这也可能对ZnO:N的p型导电性有贡献.
N-doped, p-type ZnO (ZnO: N) thin films were prepared by magnetron sputtering using NO as the N-doping source. The introduction of Ar in the growth ambient could evidently improve the p-type conductivity and crystal quality of the ZnO: N films, with the lowest room-temperature resistivity of 3.51 Ω cm obtained at an optimal Ar partial pressure of 30%. The p-type ZnO: N films have high optical quality, as suggested by temperature-dependent photoluminescence spectra. The N O substitution acceptor state with an energy level of 180 meV was identified from the free-to-neutral-acceptor (e, A 0) transition. The N O-acceptor bound-exciton binding energy was derived to be 17 meV from the neutral-acceptor-bound-exciton and free exciton emissions. The Haynes factor was about 0.094 for the N O acceptor in ZnO. Besides the N O acceptor, a zinc vacancy (V Zn) acceptor state with an energy level of 255 meV was also identified in ZnO: N from the (e, A 0) transition, which might also contribute to the observed p-type conductivity.
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