A micro-array bio detection system based on a GMR sensor with 50-ppm sensitivity

A micro-array bio detection system based on a GMR sensor with 50-ppm sensitivity
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基于 GMR 传感器的微阵列生物检测系统,灵敏度为 50 ppm

DOI:
10.1007/s11432-016-0645-2
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发表时间:
2017-04
期刊:
Science China Information Sciences
影响因子:
--
通讯作者:
Qian He
Qian He
中科院分区:
其他
文献类型:
--
作者:
Zhu Cheng;Zhang Lei;Geng Jinwen;Shi Xizeng;Qian He

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生物检测在医院和实验室中得到广泛应用。然而,传统的生物检测方法存在检测时间长、操作复杂和灵敏度低的问题,这些问题阻碍了它们在护理点检测(POCT)应用中的使用。微电子生物检测方法被提出来克服这些问题。基于微电子技术的生物检测允许容易的系统集成,导致快速检测速度和简单操作。在这项工作中,一个完全微电子生物检测系统,包括传感器的设计,读出策略,和数据处理提出了基于巨磁阻生物传感器。设计了一种GMR传感器芯片,并测试了不同钝化层厚度对灵敏度的影响。实现了40 nm厚度的钝化,以产生最大的响应而不氧化和击穿。为了集成读出电路并简化操作,设计并制作了4通道读出生物芯片,该芯片在工作频率下具有对应于−116.84 dBm/Hz的超低输出噪声。这意味着噪声仅大致对应于直径为200 nm的五个磁性纳米颗粒的信号水平。还利用参考传感器来消除不需要的信号并减少共模噪声和误差以提高灵敏度。测量表明,达到了90%的抑制。测量结果还表明,50 ppm的灵敏度实现与建议的GMR生物检测系统。
Bio detection is widely utilized in hospitals and laboratories. However, conventional bio detection methods suffer from long detection time, complex operation, and low sensitivity, and these issues prevent their use in point of care testing (POCT) applications. Microelectronic bio detection methods are proposed to overcome these issues. Bio detection based on a micro-electronic technique allows easy integration of a system, leading to a fast detection speed and simple operation. In this work, a fully microelectronic bio detection system including a sensor design, a read-out strategy, and data processing is proposed based on a GMR biosensor. A GMR sensor chip is designed and different passivation layer thicknesses are tested to improve sensitivity. A 40 nm thickness passivation is realized to produce the largest response without oxidization and breakdown. In order to integrate the read-out circuit and simplify operations, a 4-channel read-out biochip is designed and fabricated, and this exhibits a super-low output noise corresponding to −116.84 dBm/Hz at the operation frequency. This means that the noise only approximately corresponds to the signal level of five magnetic nanoparticles with a diameter of 200 nm. A reference sensor is also utilized to cancel the unwanted signal and reduce common-mode noise and error to improve sensitivity. Measurements indicate that 90% suppression is achieved. The measurements also reveal that a sensitivity of 50 ppm is achieved with the proposed GMR bio detection system.
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