Interface chemistry of CdZnTe films studied by a peel-off approach

Interface chemistry of CdZnTe films studied by a peel-off approach
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通过剥离方法研究 CdZnTe 薄膜的界面化学

DOI:
10.1016/j.apsusc.2016.01.245
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发表时间:
2016-12
影响因子:
6.7
通讯作者:
Wang Linjun
Wang Linjun
中科院分区:
材料科学1区
文献类型:
--
作者:
Tao Jun;Xu Haitao;Zhang Yuelu;Ji Huanhuan;Xu Run;Huang Jian;Zhang Jijun;Liang Xiaoyan;Tang Ke;Wang Linjun

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采用近空间升华法在200-500 °C温度范围内沉积了厚度大于50 μm的CdZnTe薄膜。采用剥离法研究了CdZnTe厚膜的界面化学。对于所有的CdZnTe薄膜,扫描电子显微镜图像显示,在界面处形成的小的和圆状的晶粒在表面形成的大的有序晶粒。X射线衍射、拉曼和X射线光电子能谱结果表明,在200 °C的低温衬底温度下生长的CdZnTe薄膜,其与衬底之间的界面层为Te和CdTe的混合层。界面层的厚度可以通过使用X射线光电子能谱的深度剖面估计为84 nm。相比之下,在500 °C的高衬底温度下发现小于14 nm的薄界面层。在较低的生长温度下,Te 2和Cd(Zn)反应生成CdZnTe是形成较厚界面层和成核阶段沉积速率较慢的主要原因。
CdZnTe films with thickness above 50 μm were deposited at temperatures of 200–500 °C by Close Space Sublimation method. A peel-off approach has been adopted to study the interface chemistry of CdZnTe thick films. For all the CdZnTe films, the scanning electron microscopy images show the small and round-like grains formed at interface in contrast to the large ordered grains at surface. For CdZnTe films grown at a low substrate temperature of 200 °C, the interface layer between CdZnTe and substrate is mixed with Te and CdTe, as evidenced by X-ray diffraction, Raman and X-ray photoelectron spectroscopy results. The thickness of the interface layer can be estimated to be 84 nm by depth profile using X-ray photoelectron spectroscopy. In contrast, a thin interface layer less than 14 nm is found at a high substrate temperature of 500 °C. The limited reaction of Te2and Cd (Zn) to CdZnTe at a low growth temperature is responsible for the formation of the thick interface layer and a slow deposition rate at the nucleation stage.
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