Design of U-Shape Channel Tunnel FETs With SiGe Source Regions

Design of U-Shape Channel Tunnel FETs With SiGe Source Regions
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具有 SiGe 源区的 U 形沟道隧道 FET 的设计

DOI:
10.1109/ted.2013.2289075
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发表时间:
2014
影响因子:
3.1
通讯作者:
Zhang, David Wei
Zhang, David Wei
中科院分区:
工程技术2区
文献类型:
--
作者:
Liu, Xiao-Yong;Sun, Qing-Qing;Zhou, Peng;Zhang, David Wei

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本文采用二维计算机辅助设计仿真的方法,研究了一种具有SiGe源区的新型u型沟道隧道场效应晶体管(UTFET)。当器件开启时,隧道面积的扩大和隧道速率的提高大大增加了隧道电流。同时,由于延长了物理通道长度,抑制了UTFET的关漏电流。通过在源区引入掺n+的Si δ层,可以进一步提高UTFET的导通隧道电流。插入的δ层显著缩短了带间隧穿路径,扩大了隧穿面积,从而提高了器件的隧穿速率。当VGS在0 ~ 0.46 V范围内变化时,优化后的UTFET亚阈值摆幅(SS)平均值为58 mV/dec。采用带δ层的sige源UTFET结构,可以同时实现低漏电流、高驱动电流和超低SS的优点。
In this brief, a novel U-shape-channel tunneling field-effect transistor (UTFET) with a SiGe source region is investigated by 2-D technology computer aided design simulation. The enlarged tunneling area and enhanced tunneling rate dramatically increase the tunneling current when the device is turned on. Meanwhile, the off-leakage current of UTFET is suppressed because of the extended physical channel length. The on-state tunneling current of UTFET can be further improved by introducing an n+-doped Si delta layer under the source region. The inserted delta layer significantly shortens the band-to-band tunneling path, enlarges tunneling area, and thus enhances the tunneling rate of this device. The average value of the subthreshold swing (SS) of the optimized UTFET is 58 mV/dec when VGS is varied from 0 to 0.46 V. Using the SiGe-source UTFET structure with a delta layer, the merits of low leakage current, high drive current, and ultralow SS can be realized simultaneously.
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