Single-layer versus two-layer stamps for reduced pressure thermal nanoimprint
Single-layer versus two-layer stamps for reduced pressure thermal nanoimprint
复制标题
减压热纳米压印的单层与两层印模
DOI：
10.1007/s00339-015-9301-2
复制
发表时间：
2015
期刊：
影响因子：
--
通讯作者：
H.-C. Scheer
中科院分区：
文献类型：
--
作者：
M. Papenheim;K. Dhima;S. Wang;C. Steinberg;H.-C. Scheer
低压压印对于避免印模变形、印模失效以及聚合物恢复是有意义的。当使用步进程序制备大面积印模时，需要低压来优化缝合。然而，对于低压压印，印模和衬底之间的保形接触是至关重要的。诚然，保形接触所需的压印压力取决于印模材料及其厚度。为了了解柔性印章可以在多大程度上降低压印压力，我们比较了不同的印章材料和印章结构，单层印章和双层印章。双层邮票是复制邮票，其中结构被复制在一层薄薄的OrmoStamp中，由背板固定。在板理论的背景下，我们推导出的压力降低相比，硅邮票通过计算各自的压力比，独立于几何形状。此外，温度引起的问题得到解决，这是相关的热压印过程。这些问题与印模和衬底的热膨胀系数之间的失配有关，并且在两层印模的情况下，与背板材料和顶层之间的失配有关。后者导致温度引起的冲压弯曲。在简单的分析计算的基础上，单层邮票和两层邮票在减压下的热压印的潜力进行了讨论，并提供了指导方针，以评估当复制邮票用于压印时的压印情况。结果表明，即使在基于温度的过程中，两层邮票的吸引力降低压力纳米压印。
Low-pressure imprint is interesting to avoid stamp deformation, stamp failure as well as polymer recovery. When large-area stamps are prepared with a stepping procedure, low pressure is required to optimize the stitching. However, with low-pressure imprint, conformal contact between stamp and substrate is critical. Admittedly, the imprint pressure required for conformal contact depends on the stamp material and its thickness. To get an idea to which extent the imprint pressure can be reduced with a flexible stamp, we compared different stamp materials and stamp architectures, single-layer stamps and two-layer stamps. The two-layer stamps are replica stamps, where the structures were replicated in a thin layer of OrmoStamp, fixed by a backplane. On the background of plate theory, we deduce the pressure reduction compared to a Si stamp by calculating the respective pressure ratio, independent from geometries. In addition, temperature-induced issues are addressed which are of relevance for a thermal imprint process. These issues are related to the mismatch between the thermal expansion coefficients of the stamp and the substrate, and in case of a two-layer stamp, to the mismatch between the backplane material and the top layer. The latter results in temperature-induced stamp bending. On the basis of simple analytical calculations, the potential of single-layer stamps and two-layer stamps with respect to thermal imprint at reduced pressure is discussed and guidelines are provided to assess the imprint situation when replica stamps are used for imprint. The results demonstrate the attractiveness of two-layer stamps for reduced pressure nanoimprint, even in a temperature-based process.
登录
查看更多内容
影响因子：
2.3
作者：
L. Montelius;B. Heidari;Mariusz Graczyk;I. Maximov;Eva-Lena Sarwe;T. Ling
通讯作者：
L. Montelius;B. Heidari;Mariusz Graczyk;I. Maximov;Eva-Lena Sarwe;T. Ling
模拟纳米压印光刻 PTFE 柔性印模的本构和摩擦行为
DOI：
--
发表时间：
2013
期刊：
影响因子：
--
作者：
M. R. Sonne;J. Hattel
通讯作者：
J. Hattel
300mm 晶圆级三维纳米压印光刻工艺
DOI：
--
发表时间：
2013
期刊：
影响因子：
--
作者：
S. Landis;V. Reboud;T. Enot;C. Vizioz
通讯作者：
C. Vizioz
通过热纳米压印光刻中的压力控制来防止恢复
DOI：
--
发表时间：
2009
期刊：
影响因子：
--
作者：
H. Scheer;N. Bogdanski;S. Möllenbeck;A. Mayer
通讯作者：
A. Mayer
影响因子：
2.3
作者：
Schleunitz, Arne;Spreu, Christian;Schift, Helmut
通讯作者：
Schift, Helmut