Top-gated graphene nanoribbon transistors with ultrathin high-k dielectrics.
Top-gated graphene nanoribbon transistors with ultrathin high-k dielectrics.
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DOI:
10.1021/nl100840z
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发表时间:
2010-05-12
期刊:
影响因子:
10.8
通讯作者:
Duan X
中科院分区:
文献类型:
--
作者:
Liao L;Bai J;Cheng R;Lin YC;Jiang S;Huang Y;Duan X
The integration ultra-thin high dielectric constant (high-k) materials with graphene nanoribbons (GNRs) for top-gated transistors can push their performance limit for nanoscale electronics. Here we report the assembly of Si/HfO2 core/shell nanowires on top of individual GNRs as the top-gates for GNR field-effect transistors with ultra-thin high-k dielectrics. The Si/HfO2 core/shell nanowires are synthesized by atomic layer deposition of HfO2 shell on highly-doped silicon nanowires with a precise control of the dielectric thickness down to 1–2 nm. Using the core/shell nanowires as the top-gates, high performance GNR transistors have been achieved with transconductance reaching 3.2 mS μm−1, the highest value for GNR transistors reported to date. This method, for the first time, demonstrates the effective integration of ultra-thin high-k dielectrics with graphene with precisely controlled thickness and quality, representing an important step towards high performance graphene electronics.
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