Characterization of Films with Thickness Less than 10 nm by Sensitivity-Enhanced Atomic Force Acoustic Microscopy.
Characterization of Films with Thickness Less than 10 nm by Sensitivity-Enhanced Atomic Force Acoustic Microscopy.
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DOI：
10.1007/s11671-010-9778-8
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发表时间：
2011-12
影响因子：
--
通讯作者：
Komatsu S
中科院分区：
文献类型：
--
作者：
Muraoka M;Komatsu S
我们提出了一种方法，使用灵敏度增强的原子力声学显微镜，其中具有平坦的尖端的集中质量的悬臂梁被用作敏感的振荡器的特性的薄膜。针对使用不同方法在硬盘上沉积的6 nm厚和10 nm厚的类金刚石碳（DLC）膜，评估定义为E/（1 - ν2）的有效杨氏模量，其中E是杨氏模量，ν是泊松比。的悬臂梁的谐振频率的影响，不仅由膜的弹性，但也由基板，即使在约0.6 nm的压痕深度。采用分层半空间压痕的理论公式，并结合无DLC涂层的硬盘，消除了基体效应。6 nm厚和10 nm厚的DLC膜的模量分别为392和345 GPa。误差分析表明，模量的标准偏差小于5%。
We present a method for characterizing ultrathin films using sensitivity-enhanced atomic force acoustic microscopy, where a concentrated-mass cantilever having a flat tip was used as a sensitive oscillator. Evaluation was aimed at 6-nm-thick and 10-nm-thick diamond-like carbon (DLC) films deposited, using different methods, on a hard disk for the effective Young's modulus defined as E/(1 - ν2), where E is the Young's modulus, and ν is the Poisson's ratio. The resonant frequency of the cantilever was affected not only by the film's elasticity but also by the substrate even at an indentation depth of about 0.6 nm. The substrate effect was removed by employing a theoretical formula on the indentation of a layered half-space, together with a hard disk without DLC coating. The moduli of the 6-nm-thick and 10-nm-thick DLC films were 392 and 345 GPa, respectively. The error analysis showed the standard deviation less than 5% in the moduli.
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影响因子：
4
作者：
Ferrari, AC;Robertson, J;Pastorelli, R
通讯作者：
Pastorelli, R
影响因子：
2.1
作者：
Cord, B;Scherer, J
通讯作者：
Scherer, J
影响因子：
4
作者：
CRETIN, B;STHAL, F
通讯作者：
STHAL, F
影响因子：
3.5
作者：
Kopycinska-Müller, M;Geiss, RH;Hurley, DC
通讯作者：
Hurley, DC
DOI：
10.1016/0020-7683(87)90116-8
发表时间：
1987-01-01
影响因子：
3.6
作者：
KING, RB
通讯作者：
KING, RB