Ultra-Precision Shaping and Polishing Experiments in Nanoparticle Colloid Jet Machining
Ultra-Precision Shaping and Polishing Experiments in Nanoparticle Colloid Jet Machining
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纳米粒子胶体射流加工中的超精密成型和抛光实验
DOI：
10.4028/www.scientific.net/amr.291-294.1759
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发表时间：
2011-07
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本文通过超精密成形和抛光实验，研究了纳米胶体射流加工的成形和抛光特性。以具有非球面轮廓的高纯石英玻璃样品为加工对象，采用纳米粒子胶体喷射加工方法对样品进行抛光。利用表面轮廓仪对纳米粒子胶体射流加工成形前后工件的表面轮廓进行了测量。测量结果表明，纳米胶体射流加工具有良好的成形能力，能够满足超精密加工对表面形状修正的要求。利用原子力显微镜（AFM）观察了纳米粒子胶体射流加工抛光工件表面的微观形貌特征。观察结果表明，纳米颗粒胶体射流加工后，工件表面粗糙度由1.919 nm RMS降低到0.784 nm RMS。基于原子力显微镜的观察结果，对纳米颗粒胶体射流加工的抛光性能进行了功率谱分析。
In this paper, ultra-precision shaping and polishing experiments have been done to research the shaping and polishing characters of nanoparticle colloid jet machining. A high-purity quartz glass sample with aspheric surface profile was employed as workpiece and polished by nanoparticle colloid jet machining. We utilized surface profilometer to measure the surface profiles of workpiece before and after shaping by nanoparticle colloid jet machining. The measurement results indicate that the nanoparticle colloid jet machining has good shaping ability to satisfy the demands for surface shape correction in ultra-precision machining. Atomic force microscopy (AFM) was utilized to observe the surface microscopic morphological characteristics of the workpiece surface polished by nanoparticle colloid jet machining. The observation results show that the roughness of the workpiece surface has been reduced from 1.919 nm RMS to 0.784 nm RMS by nanoparticle colloid jet machining. Based on the atomic force microscopy observation results, power spectral density analyses have been done to evaluate the polishing performance of the nanoparticle colloid jet machining.
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影响因子：
--
作者：
J. Yuan;Fei-hu Zhang;Yi-fan Dai;R. Kang;Hui Yang;L. Uuml;Binghai
通讯作者：
J. Yuan;Fei-hu Zhang;Yi-fan Dai;R. Kang;Hui Yang;L. Uuml;Binghai
影响因子：
3.5
作者：
Xu, J;Luo, JB;Wen, SZ
通讯作者：
Wen, SZ
DOI：
10.1088/0960-1317/19/5/054009
发表时间：
2009-05-01
影响因子：
2.3
作者：
Zhang, Feihu;Song, Xiaozong;Luan, Dianrong
通讯作者：
Luan, Dianrong
影响因子：
1.8
作者：
Mori, Y;Yamamura, K;Mimura, H
通讯作者：
Mimura, H
影响因子：
1.9
作者：
Fahnle, OW;van Brug, H;Frankena, HJ
通讯作者：
Frankena, HJ