Significantly reduced in-plane tensile stress of GaN films grown on SiC substrates by using graded AlGaN buffer and SiNx interlayer
Significantly reduced in-plane tensile stress of GaN films grown on SiC substrates by using graded AlGaN buffer and SiNx interlayer
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通过使用梯度 AlGaN 缓冲层和 SiNx 中间层,显着降低了在 SiC 衬底上生长的 GaN 薄膜的面内拉伸应力
DOI:
10.1016/j.spmi.2018.08.020
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发表时间:
2018-10
影响因子:
3.1
通讯作者:
Guotong Du
中科院分区:
文献类型:
--
作者:
Gaoqiang Deng;Yuantao Zhang;Ye Yu;Zhen Huang;Xu Han;Liang Chen;Long Yan;Pengchong Li;Xin Dong;Degang Zhao;Guotong Du
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DOI:
10.1007/s10854-015-3948-5
发表时间:
2016-02
期刊:
Journal of Materials Science: Materials in Electronics
影响因子:
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DOI:
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影响因子:
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4
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