Design and Demonstration of an In-Plane Micro-Optical-Electro-Mechanical-System Accelerometer Based on Talbot Effect of Dual-Layer Gratings.
Design and Demonstration of an In-Plane Micro-Optical-Electro-Mechanical-System Accelerometer Based on Talbot Effect of Dual-Layer Gratings.
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DOI：
10.3390/mi14071301
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发表时间：
2023-06-25
期刊：
影响因子：
3.4
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中科院分区：
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--
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提出了一种基于双层光栅塔尔博特效应的超灵敏单轴面内微光机电系统（MOEMS）加速度计。基于光栅的塔尔博特效应，可以将加速度转化为衍射强度的变化，从而改变光电探测器的电压信号。我们对机械结构进行了调研和优化设计；加速度计的谐振频率为1878.9 Hz，机械灵敏度为0.14 μm/g。光栅参数也进行了优化，周期为4 μm，光栅间隔为10 μm。实验结果表明，优化设计的面内MOEMS加速度计的加速度灵敏度为0.74 V/g（非线性度优于0.4%），偏置稳定性为75 μg，加速度分辨率为2.0 mg，在智能手机、汽车电子、结构健康检测等方面具有潜在的应用前景。
An ultrasensitive single-axis in-plane micro-optical-electro-mechanical-system (MOEMS) accelerometer based on the Talbot effect of dual-layer gratings is proposed. Based on the Talbot effect of gratings, the acceleration can be converted into the variation of diffraction intensity, thus changing the voltage signal of photodetectors. We investigated and optimized the design of the mechanical structure; the resonant frequency of the accelerometer is 1878.9 Hz and the mechanical sensitivity is 0.14 μm/g. And the optical grating parameters have also optimized with a period of 4 μm and a grating interval of 10 μm. The experimental results demonstrated that the in-plane MOEMS accelerometer with an optimal design achieved an acceleration sensitivity of 0.74 V/g (with better than 0.4% nonlinearity), a bias stability of 75 μg and an acceleration resolution of 2.0 mg, suggesting its potential applications in smartphones, automotive electronics, and structural health detection.
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