One-Port Electronic Detection Strategies for Improving Sensitivity in Piezoelectric Resonant Sensor Measurements.
One-Port Electronic Detection Strategies for Improving Sensitivity in Piezoelectric Resonant Sensor Measurements.
复制标题
DOI：
10.3390/s16111781
复制
发表时间：
2016-10-25
期刊：
影响因子：
--
通讯作者：
McNeil C
中科院分区：
文献类型：
--
作者：
Hu Z;Hedley J;Keegan N;Spoors J;Gallacher B;McNeil C
本文描述了一种用于压电薄膜驱动硅圆形隔膜谐振器的单端口机械谐振检测方案，并讨论了这种方法在简并模式质量检测传感器中的局限性。该传感器利用径向对称微结构的简并振动模式，从而提供感测模式和参考模式，从而最大限度地减少环境对性能的影响。圆形膜片谐振器的厚度为 4.5 µm，直径为 140 µm。 0.75 µm 的 PZT 薄膜在顶部表面形成图案，用于激励和振动传感。该器件在 (1, 1) 模式下显示出 5.8 MHz 的谐振频率。设计了电子接口电路来消除大的静态和寄生电容，从而可以对机械振动进行电气检测，从而能够准确测量感测模式和参考模式之间的频率分割。提取的运动电流与振动速度成正比，被反馈到驱动器，以有效提高 Q 因子，从而使设备灵敏度提高 8 倍以上。采用软件锁相环来自动跟踪谐振频率，从而实现更快、更准确的谐振检测。结果表明，通过利用绝对模式频率作为传感器温度的指示，可以考虑由驱动电子设备发热引起的传感器温度变化，并得出 2.3 Hz 的最终测量灵敏度。
This paper describes a one-port mechanical resonance detection scheme utilized on a piezoelectric thin film driven silicon circular diaphragm resonator and discusses the limitations to such an approach in degenerate mode mass detection sensors. The sensor utilizes degenerated vibration modes of a radial symmetrical microstructure thereby providing both a sense and reference mode allowing for minimization of environmental effects on performance. The circular diaphragm resonator was fabricated with thickness of 4.5 µm and diameter of 140 µm. A PZT thin film of 0.75 µm was patterned on the top surface for the purposes of excitation and vibration sensing. The device showed a resonant frequency of 5.8 MHz for the (1, 1) mode. An electronic interface circuit was designed to cancel out the large static and parasitic capacitance allowing for electrical detection of the mechanical vibration thereby enabling the frequency split between the sense and reference mode to be measured accurately. The extracted motional current, proportional to the vibration velocity, was fed back to the drive to effectively increase the Q factor, and therefore device sensitivity, by more than a factor of 8. A software phase-locked loop was implemented to automatically track the resonant frequencies to allow for faster and accurate resonance detection. Results showed that by utilizing the absolute mode frequencies as an indication of sensor temperature, the variation in sensor temperature due to the heating from the drive electronics was accounted for and led to an ultimate measurement sensitivity of 2.3 Hz.
登录
查看更多内容
影响因子：
2.7
作者：
Burnett, Richie;Harris, Alun;McNeil, Calum
通讯作者：
McNeil, Calum
影响因子：
1.6
作者：
Bouzidi, L;Narine, SS;Slavin, AJ
通讯作者：
Slavin, AJ
DOI：
10.1088/0960-1317/18/2/025021
发表时间：
2008-02-01
影响因子：
2.3
作者：
Ismail, A. K.;Burdess, J. S.;Hedley, J.
通讯作者：
Hedley, J.
影响因子：
4.6
作者：
Mehdizadeh, Emad;Chapin, Jennifer C.;Pourkamali, Siavash
通讯作者：
Pourkamali, Siavash
影响因子：
1.6
作者：
Arnau, A;Sogorb, T;Jiménez, Y
通讯作者：
Jiménez, Y