Synthesis and characterization of AlTiSiN/CrSiN multilayer coatings by cathodic arc ion-plating
Synthesis and characterization of AlTiSiN/CrSiN multilayer coatings by cathodic arc ion-plating
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阴极电弧离子镀AlTiSiN/CrSiN多层涂层的合成与表征
DOI：
10.1016/j.apsusc.2014.05.166
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发表时间：
2014-09
影响因子：
6.7
通讯作者：
D.J. Fu
中科院分区：
文献类型：
--
作者：
R.Y. Wang;Z.G. Li;Y.M. Chen;D.J. Fu
采用阴极电弧离子镀技术，以Cr、AlTi为阴极，SiH 4为保护气体，在Si（100）和硬质合金基体上制备了AlTiSiN/CrSiN多层涂层。系统研究了SiH 4气体流量对涂层结构和力学性能的影响。XRD和TEM分析表明，AlTiSiN/CrSiN涂层具有B1 NaCl型纳米多层结构，CrSiN纳米层与AlTiSiN纳米层交替排列，具有多晶面取向。随着SiH 4流量的增加，涂层中Si含量增加。随着SiH 4气体流量从20增加到40 sccm，涂层的硬度增加到最大值3500 Hv0.05，然后随着SiH 4气体的进一步加入而降低。在流量为48 sccm时，获得了73 N的较高粘附力。涂层与Si 3 N4和硬质合金球的摩擦系数随SiH 4流量的变化规律不明显，涂层与Si 3 N4的摩擦系数随SiH 4流量的变化规律不明显。
AlTiSiN/CrSiN multilayer coatings were deposited on Si (1 0 0) and cemented carbide substrates using Cr, AlTi cathodes and SiH4gases by cathodic arc ion plating system. The influences of SiH4gases flowrate on the structural and mechanical properties of the coatings were investigated, systematically. AlTiSiN/CrSiN coatings exhibit a B1 NaCl-type nano-multilayered structure in which the CrSiN nano-layers alternate with AlTiSiN nano-layers with multiple orientations of crystal planes indicated by XRD patterns and TEM. Si contents of the coatings increase with increasing SiH4flowrate. The hardness of the coatings increases to the maximum value of 3500 Hv0.05with increasing SiH4flowrate from 20 to 40 sccm and then decreases with further addition of SiH4gases. A higher adhesive force of 73 N is obtained at the flowrate of 48 sccm. The coatings exhibit different tribological performance when the mating materials were varied from Si3N4to cemented carbide balls and the variation of friction coefficients of the coatings against Si3N4influenced by SiH4flowrate are not obvious as against cemented carbide balls.
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