A lateral RF MEMS capacitive switch utilizing parylene as dielectric
A lateral RF MEMS capacitive switch utilizing parylene as dielectric
复制标题
采用聚对二甲苯作为电介质的横向 RF MEMS 电容开关
DOI：
10.1007/s00542-011-1377-9
复制
发表时间：
2012
期刊：
影响因子：
--
通讯作者：
Li, Zhihong
中科院分区：
文献类型：
--
作者：
He, Xunjun;Liu, Bo;Lv, Zhiqiu;Li, Zhihong
A novel lateral RF MEMS capacitive switch was reported in this paper. This switch employed parylene as the dielectric material, taking advantages of its low temperature deposition and conformal coating. The low resistivity single crystalline silicon served as the material of the mechanical structures. The switch was fabricated by bulk micromachining processes with only two lithographic masks and a shadow mask. The dynamical response, parylene insulation performance, and RF performances of the fabricated switch were characterized, respectively. The switching time from the open state to the close state was 105 μs at a loaded voltage of 78 V, while 15.6 μs from the close state to the open state. The isolation was better than 15 dB from 20 to 40 GHz, and the maximal isolation was 23.5 dB at 25 GHz; while the insertion loss was below 1.4 dB at 25 GHz, when bonding wires connected the ground lines. These results verify that the parylene is a good candidate material to act as sidewall dielectric to realize the lateral capacitive switch.
登录
查看更多内容
影响因子：
2.7
作者：
Park, Jachong;Shim, Eun Sub;Cho, Dong-il
通讯作者：
Cho, Dong-il
影响因子：
2.7
作者：
Ye Wang;Zhihong Li;D. McCormick;N. Tien
通讯作者：
Ye Wang;Zhihong Li;D. McCormick;N. Tien
影响因子：
1.5
作者：
S. Kamide;Kenichiro Suzuki
通讯作者：
S. Kamide;Kenichiro Suzuki
影响因子：
1.5
作者：
Ru‐Yuan Yang;C. Hung;Y. Su;M. Weng;Hung-Wei Wu
通讯作者：
Ru‐Yuan Yang;C. Hung;Y. Su;M. Weng;Hung-Wei Wu
影响因子：
2.3
作者：
S. Kang;H. Kim;K. Chun
通讯作者：
S. Kang;H. Kim;K. Chun