Through-holes, cavities and perforations in polydimethylsiloxane (PDMS) chips
Through-holes, cavities and perforations in polydimethylsiloxane (PDMS) chips
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聚二甲基硅氧烷 (PDMS) 芯片中的通孔、空腔和穿孔
DOI：
10.1039/c4ra09586c
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发表时间：
2014
期刊：
影响因子：
3.9
通讯作者：
Zengerle
中科院分区：
文献类型：
--
作者：
Santisteban;Zengerle
提出了一种在微流控大规模集成平台的聚二甲基硅氧烷(PDMS)层之间制作10~180μm通孔的方法。因此，我们采用了标准的PDMS旋涂工艺在由SU-8和AZ光刻胶形成微结构的硅模具上。我们的方法是基于用一层250 nm厚的八氟环丁烷(C4F8)修饰PDMS原型模具的表面极性，得到与水的接触角为125±3°。这种超疏水表面使PDMS从从旋涂PDMS层突出的微结构中排斥。随后，我们应用并表征了C4F8涂层，用于坚固地制造厚度为40μm的PDMS膜之间的层间连接器。为了能够将通孔、穿孔和/或空洞嵌入到聚二甲基硅橡胶的非常薄的层(<；20μm)中，我们将聚二甲基硅氧烷与聚二甲基硅油混合，以降低其粘度。与以前使用有机溶剂降低PDMS粘度的尝试不同，硅油与PDMS发生交联，因此不能自由扩散到聚合的PDMS中。这降低了生物应用中危险成分出血的风险。最后，我们制作了一个带有集成腔体的三层mLSI芯片，用于捕获荧光标记的珠子和细胞。通过系统的参数筛选，所提出的工艺参数可以很容易地适应多层PDMS结构制造中的特定需要。
We present a method to fabricate through-holes between 10 to 180 μm between polydimethylsiloxane (PDMS) layers of microfluidic large-scale integration platforms. Therefore we employed standard PDMS spin-coating processes onto silicon molds with microstructures formed from SU-8 and AZ photoresists. Our approach is based on the modification of the surface polarity of the PDMS prototyping molds by a 250 nm thick layer of octafluorocyclobutane (C4F8), which resulted in a contact angle of 125 ± 3° for water. This super hydrophobic surface repelled PDMS from microstructures protruding out of the spin coated PDMS layer. Subsequently, we applied and characterized the C4F8 coating for the robust fabrication of interlayer connectors between PDMS membranes of 40 μm thickness. To enable embedding of through-holes, perforations and/or cavities in very thin layers of PDMS (<20 μm) we mixed PDMS with a PDMS based silicone oil to reduce its viscosity. In contrast to previous attempts to lower the viscosity of PDMS using organic solvents, the silicone oil cross-linked to PDMS and was thus, unable to freely diffuse into the polymerized PDMS. This reduces the risk for bleeding of hazardous components in biological applications. Finally, we manufactured a three layer mLSI chip with integrated cavities for catching fluorescently labeled beads and cells. The presented process parameters can easily be adapted to specific needs in the fabrication of multi-layer PDMS arrangements by following the systematic parameter screening.
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影响因子：
56.9
作者：
Unger, MA;Chou, HP;Quake, SR
通讯作者：
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影响因子：
7.4
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19.6
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